Electrically integrated SU-8 clamped graphene drum resonators for strain engineering

Physics

• Resonator 100%
• Graphene 40%
• Strain 20%
• Resonant Frequencies 10%
• Signal Processing 10%
• Utilization 10%
• Increasing 10%
• Detection 10%
• Fabrication 10%
• Gases 10%
• Spectra 10%

Engineering

• Nanoelectromechanical System 20%
• Fabrication 10%
• Polymer 10%
• Two Dimensional 10%
• Responsivity 10%
• Resonant Frequency 10%
• Electrical Measurement 10%
• Engineering Strain 10%
• Yields 10%
• Applications 10%
• Demonstrates 10%
• Large Strain 10%