Electrically integrated SU-8 clamped graphene drum resonators for strain engineering

Sunwoo Lee; Changyao Chen; Vikram V. Deshpande; Gwan Hyoung Lee; Ilkyu Lee; Michael Lekas; Alexander Gondarenko; Young Jun Yu; Kenneth Shepard; Philip Kim; James Hone

doi:10.1063/1.4793302

Electrically integrated SU-8 clamped graphene drum resonators for strain engineering

Sunwoo Lee, Changyao Chen, Vikram V. Deshpande, Gwan Hyoung Lee, Ilkyu Lee, Michael Lekas, Alexander Gondarenko, Young Jun Yu, Kenneth Shepard, Philip Kim, James Hone

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

65 Citations (Scopus)

Abstract

Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this Letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, the clamping induces a large strain in the resonator, increasing its resonant frequency.

Original language	English
Article number	153101
Journal	Applied Physics Letters
Volume	102
Issue number	15
DOIs	https://doi.org/10.1063/1.4793302
Publication status	Published - 2013 Apr 15

Bibliographical note

Funding Information:
The authors like to thank Arend M. van der Zande, Nicholas Petrone, Victor Abramsky, Eugene Hwang, Changhyuk Lee, Jaeyoon Kim, Adam M. Hurst, Jerry D. Smith, and Bo Hyun Kim for critical discussions. Fabrication was performed at the Cornell Nano-Scale Facility, a member of the National Nanotechnology Infrastructure Network, which is supported by the National Science Foundation (Grant ECS-0335765), and Center for Engineering and Physical Science Research (CEPSR) Clean Room at Columba University. The authors acknowledge the support by Qualcomm Innovation Fellowship (QInF) 2012 and AFOSR MURI FA9550-09-1-0705.

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.4793302

Cite this

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title = "Electrically integrated SU-8 clamped graphene drum resonators for strain engineering",

abstract = "Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this Letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, the clamping induces a large strain in the resonator, increasing its resonant frequency.",

author = "Sunwoo Lee and Changyao Chen and Deshpande, {Vikram V.} and Lee, {Gwan Hyoung} and Ilkyu Lee and Michael Lekas and Alexander Gondarenko and Yu, {Young Jun} and Kenneth Shepard and Philip Kim and James Hone",

note = "Funding Information: The authors like to thank Arend M. van der Zande, Nicholas Petrone, Victor Abramsky, Eugene Hwang, Changhyuk Lee, Jaeyoon Kim, Adam M. Hurst, Jerry D. Smith, and Bo Hyun Kim for critical discussions. Fabrication was performed at the Cornell Nano-Scale Facility, a member of the National Nanotechnology Infrastructure Network, which is supported by the National Science Foundation (Grant ECS-0335765), and Center for Engineering and Physical Science Research (CEPSR) Clean Room at Columba University. The authors acknowledge the support by Qualcomm Innovation Fellowship (QInF) 2012 and AFOSR MURI FA9550-09-1-0705.",

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doi = "10.1063/1.4793302",

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AU - Lee, Sunwoo

AU - Chen, Changyao

AU - Deshpande, Vikram V.

AU - Lee, Gwan Hyoung

AU - Lee, Ilkyu

AU - Lekas, Michael

AU - Gondarenko, Alexander

AU - Yu, Young Jun

AU - Shepard, Kenneth

AU - Kim, Philip

AU - Hone, James

N1 - Funding Information: The authors like to thank Arend M. van der Zande, Nicholas Petrone, Victor Abramsky, Eugene Hwang, Changhyuk Lee, Jaeyoon Kim, Adam M. Hurst, Jerry D. Smith, and Bo Hyun Kim for critical discussions. Fabrication was performed at the Cornell Nano-Scale Facility, a member of the National Nanotechnology Infrastructure Network, which is supported by the National Science Foundation (Grant ECS-0335765), and Center for Engineering and Physical Science Research (CEPSR) Clean Room at Columba University. The authors acknowledge the support by Qualcomm Innovation Fellowship (QInF) 2012 and AFOSR MURI FA9550-09-1-0705.

PY - 2013/4/15

Y1 - 2013/4/15

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AB - Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this Letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, the clamping induces a large strain in the resonator, increasing its resonant frequency.

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Electrically integrated SU-8 clamped graphene drum resonators for strain engineering

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Bibliographical note

All Science Journal Classification (ASJC) codes

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