Electrical properties of PZT thin films by photochemical deposition

Hyeong Ho Park, Sook Yoon, Hyung Ho Park, Ross H. Hill

Research output: Contribution to journalConference articlepeer-review

27 Citations (Scopus)


The electrical properties of lead zirconate titanate (PZT) thin film prepared by photochemical metal-organic deposition (PMOD) using photosensitive starting precursors were characterized. Unlike sol-gel procedure based on the chemical reaction including hydrolysis and condensation, by PMOD, metallic state is obtained through the removal of organic ligand by exposure to UV. This metallic state usually turns to oxide state through oxidation reaction with atmospheric oxygen during exposure to UV. Fourier transform infra-red spectroscopic observation showed that a complete removal of organic group was possibly obtained by exposure of spin-coated PZT precursor film to UV at room temperature. After anneal treatment of the UV-exposed PZT precursor film to crystallize, a highly preferred growth orientation was found in PZT film according to the orientation of substrate Pt. The characteristics of ferroelectric properties (remnant polarization and coercive field) and leakage current behavior were almost the same as those of conventional PZT film prepared by sol-gel processing. However, a slight shift of hysteresis curve and more leaky behavior with negative direction of bias were found and it seemed to be due to the presence of micro-defects formed during PMOD reaction.

Original languageEnglish
Pages (from-to)669-673
Number of pages5
JournalThin Solid Films
Publication statusPublished - 2004 Jan 30
EventProceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States
Duration: 2002 Apr 282002 May 2

Bibliographical note

Funding Information:
This work was supported by grant No. R01-2000-000-00244-0 from the Basic Research Program of the Korea Science & Engineering Foundation.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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