Electrical conductivity in Li-Si-P-O-N oxynitride thin-films

Seung Joo Lee; Jun Hyun Bae; Hee Won Lee; Hong Koo Baik; Sung Man Lee

doi:10.1016/S0378-7753(03)00457-9

Electrical conductivity in Li-Si-P-O-N oxynitride thin-films

Seung Joo Lee, Jun Hyun Bae, Hee Won Lee, Hong Koo Baik, Sung Man Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li₃PO₄·xLi₂SiO₃ target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V.

Original language	English
Pages (from-to)	61-64
Number of pages	4
Journal	Journal of Power Sources
Volume	123
Issue number	1
DOIs	https://doi.org/10.1016/S0378-7753(03)00457-9
Publication status	Published - 2003 Sept 15

Bibliographical note

Funding Information:
This work was supported by The Korean Ministry of Science and Technology through the research program of the National Research Laboratory.

All Science Journal Classification (ASJC) codes

Renewable Energy, Sustainability and the Environment
Energy Engineering and Power Technology
Physical and Theoretical Chemistry
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/S0378-7753(03)00457-9

Cite this

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title = "Electrical conductivity in Li-Si-P-O-N oxynitride thin-films",

abstract = "Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li3PO4·xLi2SiO3 target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V.",

author = "Lee, {Seung Joo} and Bae, {Jun Hyun} and Lee, {Hee Won} and Baik, {Hong Koo} and Lee, {Sung Man}",

note = "Funding Information: This work was supported by The Korean Ministry of Science and Technology through the research program of the National Research Laboratory.",

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T1 - Electrical conductivity in Li-Si-P-O-N oxynitride thin-films

AU - Lee, Seung Joo

AU - Bae, Jun Hyun

AU - Lee, Hee Won

AU - Baik, Hong Koo

AU - Lee, Sung Man

N1 - Funding Information: This work was supported by The Korean Ministry of Science and Technology through the research program of the National Research Laboratory.

PY - 2003/9/15

Y1 - 2003/9/15

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AB - Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li3PO4·xLi2SiO3 target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V.

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Electrical conductivity in Li-Si-P-O-N oxynitride thin-films

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

UN SDGs

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