Electrical conductivity in Li-Si-P-O-N oxynitride thin-films

Seung Joo Lee, Jun Hyun Bae, Hee Won Lee, Hong Koo Baik, Sung Man Lee

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)


Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li3PO4·xLi2SiO3 target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V.

Original languageEnglish
Pages (from-to)61-64
Number of pages4
JournalJournal of Power Sources
Issue number1
Publication statusPublished - 2003 Sept 15

Bibliographical note

Funding Information:
This work was supported by The Korean Ministry of Science and Technology through the research program of the National Research Laboratory.

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering


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