Electrical and mechanical properties of surfactant-templated mesoporous silica thin films using Brij-76 surfactant

Sang Bae Jung; Choo Kyung Han; Hyung Ho Park

doi:10.1016/j.apsusc.2004.09.127

Electrical and mechanical properties of surfactant-templated mesoporous silica thin films using Brij-76 surfactant

Sang Bae Jung, Choo Kyung Han, Hyung Ho Park

Department of Materials Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

23 Citations (Scopus)

Abstract

Ordered mesoporous silica films using Brij-76 surfactant were prepared from self-assembly of organic-inorganic species and their electrical/mechanical properties were investigated for low-k application. X-ray diffraction pattern revealed highly textured pore structure. Adequate dielectric properties could be realized by controlling the chemical species of silica wall. Porosity of mesoporous silica film was 39 ± 2% and elastic modulus and hardness of the film were 14.4 and 1.25 GPa, respectively. The dielectric constant and leakage current density were measured as 2.55 and less than 2 × 10 ^-6 A/cm ² up to 1.6 MV/cm, respectively.

Original language	English
Pages (from-to)	47-50
Number of pages	4
Journal	Applied Surface Science
Volume	244
Issue number	1-4
DOIs	https://doi.org/10.1016/j.apsusc.2004.09.127
Publication status	Published - 2005 May 15
Event	12th International Conference on Solid Films and Surfaces - Hammatsu, Japan Duration: 2004 Jun 21 → 2004 Jun 25

Bibliographical note

Funding Information:
The authors wish to acknowledge the financial support from KISTEP (M1-0214-00-0228). Experiments at PLS were supported in part by the MOST and POSTECH.

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2004.09.127

Cite this

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title = "Electrical and mechanical properties of surfactant-templated mesoporous silica thin films using Brij-76 surfactant",

abstract = " Ordered mesoporous silica films using Brij-76 surfactant were prepared from self-assembly of organic-inorganic species and their electrical/mechanical properties were investigated for low-k application. X-ray diffraction pattern revealed highly textured pore structure. Adequate dielectric properties could be realized by controlling the chemical species of silica wall. Porosity of mesoporous silica film was 39 ± 2% and elastic modulus and hardness of the film were 14.4 and 1.25 GPa, respectively. The dielectric constant and leakage current density were measured as 2.55 and less than 2 × 10 -6 A/cm 2 up to 1.6 MV/cm, respectively.",

author = "Jung, {Sang Bae} and Han, {Choo Kyung} and Park, {Hyung Ho}",

note = "Funding Information: The authors wish to acknowledge the financial support from KISTEP (M1-0214-00-0228). Experiments at PLS were supported in part by the MOST and POSTECH.; 12th International Conference on Solid Films and Surfaces ; Conference date: 21-06-2004 Through 25-06-2004",

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T1 - Electrical and mechanical properties of surfactant-templated mesoporous silica thin films using Brij-76 surfactant

AU - Jung, Sang Bae

AU - Han, Choo Kyung

AU - Park, Hyung Ho

N1 - Funding Information: The authors wish to acknowledge the financial support from KISTEP (M1-0214-00-0228). Experiments at PLS were supported in part by the MOST and POSTECH.

PY - 2005/5/15

Y1 - 2005/5/15

N2 - Ordered mesoporous silica films using Brij-76 surfactant were prepared from self-assembly of organic-inorganic species and their electrical/mechanical properties were investigated for low-k application. X-ray diffraction pattern revealed highly textured pore structure. Adequate dielectric properties could be realized by controlling the chemical species of silica wall. Porosity of mesoporous silica film was 39 ± 2% and elastic modulus and hardness of the film were 14.4 and 1.25 GPa, respectively. The dielectric constant and leakage current density were measured as 2.55 and less than 2 × 10 -6 A/cm 2 up to 1.6 MV/cm, respectively.

AB - Ordered mesoporous silica films using Brij-76 surfactant were prepared from self-assembly of organic-inorganic species and their electrical/mechanical properties were investigated for low-k application. X-ray diffraction pattern revealed highly textured pore structure. Adequate dielectric properties could be realized by controlling the chemical species of silica wall. Porosity of mesoporous silica film was 39 ± 2% and elastic modulus and hardness of the film were 14.4 and 1.25 GPa, respectively. The dielectric constant and leakage current density were measured as 2.55 and less than 2 × 10 -6 A/cm 2 up to 1.6 MV/cm, respectively.

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T2 - 12th International Conference on Solid Films and Surfaces

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Electrical and mechanical properties of surfactant-templated mesoporous silica thin films using Brij-76 surfactant

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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