A series of ZnO films were deposited on c-plane sapphire substrates having different buffer layer thicknesses between 50 and 500 Å by radio-frequency (rf) magnetron sputtering. Scanning electron microscopy (SEM) was utilized to investigate the surface morphology of ZnO films. The crystallinity of ZnO films was investigated by the double-crystal X-ray diffractometry (DCXRD). The optical properties of ZnO films were also investigated using low-temperature (LT) photoluminescence (PL). It was found that the surface morphology, structural and optical properties of the films depended on the thickness of the buffer layer. The films deposited on the 100 Å thick ZnO buffer layer exhibit the good structural and optical properties with a very smooth surface.
Bibliographical noteFunding Information:
This work was supported by Bluetron Co. Ltd. and partially supported by the Korea Basic Science Institute Grant (R23-2001-00020).
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films