Effects of surface terminal bonds and microstructure of SiO₂ aerogel films on dry etching

Engineering

• Ion Implantation 100%
• Aerogels 50%
• Microstructure 33%
• Dry Etching 33%
• Surfaces 33%
• Surface Morphology 16%
• Ar Plasma 16%
• Induced Surface 16%
• Gas Plasma 16%
• Porous Film 16%
• Inhibition 16%

Material Science

• Plasma Etching 50%
• Aerogels 50%
• Dry Etching 33%
• Liquid Films 33%
• Surface 33%
• Etching 33%
• Microstructure 33%
• Surface Morphology 16%

Medicine and Dentistry

• Plasma 66%
• Silicon Dioxide 50%
• Morphology 16%
• Fluorocarbon 16%