Effects of oxygen flow rate on the properties of HfO 2 layers grown by metalorganic molecular beam epitaxy

Tae Hyoung Moon, Jae Min Myoung

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


The investigations on the properties of HfO 2 dielectric layers grown by metalorganic molecular beam epitaxy were performed. Hafnium-tetra-tert-butoxide, Hf(C 4 H 9 O) 4 was used as a Hf precursor and pure oxygen was introduced to form an oxide layer. The grown film was characterized by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), high-resolution transmission electron microscopy (HRTEM), and capacitance-voltage (C-V) and current-voltage (I-V) analyses. As an experimental variable, the O 2 flow rate was changed from 2 to 8 seem while the other experimental conditions were fixed. The XPS spectra of Hf 4f and O 1s shifted to the higher binding energy due to the charge transfer effect and the density of trapped charges in the interfacial layer was increased as the oxygen flow rate increased. The observed microstructure indicated the HfO 2 layer was polycrystalline, and the monoclinic phases are the dominant crystal structure. From the C-V analyses, k = 14-16 and EOT = 44-52 were obtained, and the current densities of (3.2-3.3) × 10 -3 A/cm 2 were measured at - 1.5 V gate voltage from the I-V analyses.

Original languageEnglish
Pages (from-to)197-203
Number of pages7
JournalApplied Surface Science
Issue number1-4
Publication statusPublished - 2005 Feb 15

Bibliographical note

Funding Information:
This work was supported by grant no. R01-2001-000-00271-0 from the Basic Research Program of the Korea Science and Engineering Foundation.

All Science Journal Classification (ASJC) codes

  • General Chemistry
  • Condensed Matter Physics
  • General Physics and Astronomy
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


Dive into the research topics of 'Effects of oxygen flow rate on the properties of HfO 2 layers grown by metalorganic molecular beam epitaxy'. Together they form a unique fingerprint.

Cite this