Effective heat conservation in a sandwich-structured microbolometer using mesoporous TiO2 layers

Sun Gyu Choi, Tae Jung Ha, Hyung Ho Park, Sangwoo Shin, Hyung Hee Cho, Kwang Ho Kwon, Mun Pyo Hong

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


The heat loss of the a-Si:H resistor layer in a microbolometer might be reduced by using ordered mesoporous TiO2 thin films as thermal insulation layers. Infrared absorption of mesoporous TiO2 thin films in the 833-1250 cm-1 wave number region was measured using a Fourier transform infrared spectrometer. Also, the infrared absorption rates of upper and lower mesoporous TiO2 films inserted into the microbolometer were calculated to be above 84% in the 8-12 μm wavelength region. The CFD-ACE thermal simulation program was used to evaluate the thermal isolation effectiveness of mesoporous TiO2 films on the a-Si:H layer; the inclusion of this film on the a-Si:H layer improved heat conservation. A mesoporous TiO2 thin film effectively reduced the thermal loss from a-Si:H resistor surface and drastically increased the temperature of the resistor film.

Original languageEnglish
Pages (from-to)131-135
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - 2009 Oct

Bibliographical note

Funding Information:
This work was supported by the IT R&D program of MKE/IITA [2009-F-018-01, TFT backplane technology for next generation display].

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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