Effect of Pt doping in mesoporous TiO₂ thin films on their electrical property

Pt-doped mesoporous TiO₂ thin films were synthesised by using sol-gel process. In this work, Pt was doped to enhance the electrical conductivity of matrix film material. Although Pt concentration was increased, pore structure and crystallisation of matrix TiO₂ were not changed significantly because Pt was uniformly doped in TiO₂. Porosity of the films was slightly decreased from 30.2% to 25% with increasing Pt concentration up to 6 at.% while the electrical conductivity of Pt doped TiO₂ film was increased about 10 times. From these results, it can be expected that thermoelectric property could be enhanced owing to this significantly enhanced electrical conductivity and maintaining mesoporous structure of TiO₂ film.