Effect of presvnthesis of Ta precursor on the formation of Ta nitrides

Jong Chul Park, Jae Hwan Pee, Hyung Ho Parka

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2 Citations (Scopus)


We synthesized Ta3N5 by ammonolysis of Ta (OH) 5 Ta(OH)5 was prepared by titration using TaCls. The stirring speed and the amount of NH4OH to be added were important factors for controlling the particle size and formation of Ta(OH)5 during titration. During transformation of Ta(OH)5to Ta3N5, the color changed from white to red. A small particle size and high level of formation of Ta(OH)3 improved nitridation, which was related to the color value. An x-ray diffractometer was used for phase identification. A scanning electron microscope was used to determine the microstmcture, particle shape, and size. A colorimeter was used to obtain CIELab values. Ultraviolet-visible (UV-VIS) spectroscopy was carried out to determine the absorbance of colored powders. Thermogravimetry and a differential scanning calorimeter were used in air with a heating rate of 5 °C/min for thermal stability andbehavior. An ON detector was used for detecting oxygen and nitrogen contents in Ta3N 5

Original languageEnglish
Pages (from-to)835-841
Number of pages7
JournalJournal of Materials Research
Issue number5
Publication statusPublished - 2010 May

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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