Effect of presvnthesis of Ta precursor on the formation of Ta nitrides

We synthesized Ta₃N₅ by ammonolysis of Ta (OH) ₅ Ta(OH)5 was prepared by titration using TaCls. The stirring speed and the amount of NH₄OH to be added were important factors for controlling the particle size and formation of Ta(OH)5 during titration. During transformation of Ta(OH)₅to Ta₃N₅, the color changed from white to red. A small particle size and high level of formation of Ta(OH)₃ improved nitridation, which was related to the color value. An x-ray diffractometer was used for phase identification. A scanning electron microscope was used to determine the microstmcture, particle shape, and size. A colorimeter was used to obtain CIELab values. Ultraviolet-visible (UV-VIS) spectroscopy was carried out to determine the absorbance of colored powders. Thermogravimetry and a differential scanning calorimeter were used in air with a heating rate of 5 °C/min for thermal stability andbehavior. An ON detector was used for detecting oxygen and nitrogen contents in Ta₃N ₅