Effect of negatively charged species on the growth behavior of silicon films in hot wire chemical vapor deposition

Jean Ho Song, Sang Hoon Pak, Nong Moon Hwang, Heon Je Kim

Research output: Contribution to journal › Article › peer-review

Cite this

@article{3c302833d56e47349a11639e40184c4d,

title = "Effect of negatively charged species on the growth behavior of silicon films in hot wire chemical vapor deposition",

author = "Song, {Jean Ho} and Pak, {Sang Hoon} and Hwang, {Nong Moon} and Kim, {Heon Je}",

year = "2008",

language = "English",

volume = "516",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "15",

}