Abstract
An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon (Si-DLC) film slid against a steel ball. The films were deposited on Si (100) wafers by a radio frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig were performed in vacuum, dry air and ambient air. It was observed that coefficient of friction decreased as the environment changed from vacuum to dry air. Results also showed that low and stable friction related closely to the smoothening of track surfaces and the formation of silicon-rich oxide debris.
| Original language | English |
|---|---|
| Pages (from-to) | 70-79 |
| Number of pages | 10 |
| Journal | Wear |
| Volume | 252 |
| Issue number | 1-2 |
| DOIs | |
| Publication status | Published - 2002 Jan |
Bibliographical note
Funding Information:The authors would like to thank the Korea Ministry of Science and Technology and Critical Technology 21 program (Machinery Design Technology Enhancement) and National Laboratory Program for their support and interest in this work.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Mechanics of Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry