Effect of deposition temperature on the properties of Al-doped ZnO films prepared by pulsed DC magnetron sputtering for transparent electrodes in thin-film solar cells

Doo Soo Kim; Ji Hyeon Park; Beom Ki Shin; Kyeong Ju Moon; Myoungwoo Son; Moon Ho Ham; Woong Lee; Jae Min Myoung

doi:10.1016/j.apsusc.2012.07.082

Effect of deposition temperature on the properties of Al-doped ZnO films prepared by pulsed DC magnetron sputtering for transparent electrodes in thin-film solar cells

Doo Soo Kim, Ji Hyeon Park, Beom Ki Shin, Kyeong Ju Moon, Myoungwoo Son, Moon Ho Ham, Woong Lee, Jae Min Myoung

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

A simple but scalable approach to the production of surface-textured Al-doped ZnO(AZO) films for low-cost transparent electrode applications in thin-film solar cells is introduced in this study by combining pulsed dc magnetron sputtering (PDMS) with wet etching in sequence. First, structural, electrical, and optical properties of the AZO films prepared by a PDMS were investigated as functions of deposition temperature to obtain transparent electrode films that can be used as indium-free alternative to ITO electrodes. Increase in the deposition temperature to 230 °C accompanied the improvement in crystalline quality and doping efficiency, which enabled the lowest electrical resistivity of 4.16 × 10 ^-4 Ω cm with the carrier concentration of 1.65 × 10 ²¹ cm ^-3 and Hall mobility of 11.3 cm ² /V s. The wet etching of the films in a diluted HCl solution resulted in surface roughening via the formation of crater-like structures without significant degradation in the electrical properties, which is responsible for the enhanced light scattering capability required for anti-reflective electrodes in thin film solar cells.

Original language	English
Pages (from-to)	596-599
Number of pages	4
Journal	Applied Surface Science
Volume	259
DOIs	https://doi.org/10.1016/j.apsusc.2012.07.082
Publication status	Published - 2012 Oct 15

Bibliographical note

Funding Information:
This work was supported by the Technology Innovation Program (Industrial Strategic technology development program, 10040741, Development of the Low Damage Sputtering Source for TCO Layers) funded by the Ministry of Knowledge Economy (MKE, Korea), the R&BD Program of MKE/KIAT (2010-8-1075), and WCU (World Class University) program through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology (R32-20031). M. Son and M.H. Ham acknowledge support by the WCU program through an NRF Grant (R31-10026) of MEST.

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2012.07.082

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@article{8ef6525af03340619ea11c6ee770d3ac,

title = "Effect of deposition temperature on the properties of Al-doped ZnO films prepared by pulsed DC magnetron sputtering for transparent electrodes in thin-film solar cells",

abstract = " A simple but scalable approach to the production of surface-textured Al-doped ZnO(AZO) films for low-cost transparent electrode applications in thin-film solar cells is introduced in this study by combining pulsed dc magnetron sputtering (PDMS) with wet etching in sequence. First, structural, electrical, and optical properties of the AZO films prepared by a PDMS were investigated as functions of deposition temperature to obtain transparent electrode films that can be used as indium-free alternative to ITO electrodes. Increase in the deposition temperature to 230 °C accompanied the improvement in crystalline quality and doping efficiency, which enabled the lowest electrical resistivity of 4.16 × 10 -4 Ω cm with the carrier concentration of 1.65 × 10 21 cm -3 and Hall mobility of 11.3 cm 2 /V s. The wet etching of the films in a diluted HCl solution resulted in surface roughening via the formation of crater-like structures without significant degradation in the electrical properties, which is responsible for the enhanced light scattering capability required for anti-reflective electrodes in thin film solar cells.",

author = "Kim, {Doo Soo} and Park, {Ji Hyeon} and Shin, {Beom Ki} and Moon, {Kyeong Ju} and Myoungwoo Son and Ham, {Moon Ho} and Woong Lee and Myoung, {Jae Min}",

note = "Funding Information: This work was supported by the Technology Innovation Program (Industrial Strategic technology development program, 10040741, Development of the Low Damage Sputtering Source for TCO Layers) funded by the Ministry of Knowledge Economy (MKE, Korea), the R&BD Program of MKE/KIAT (2010-8-1075), and WCU (World Class University) program through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology (R32-20031). M. Son and M.H. Ham acknowledge support by the WCU program through an NRF Grant (R31-10026) of MEST.",

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doi = "10.1016/j.apsusc.2012.07.082",

language = "English",

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journal = "Applied Surface Science",

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AU - Kim, Doo Soo

AU - Park, Ji Hyeon

AU - Shin, Beom Ki

AU - Moon, Kyeong Ju

AU - Son, Myoungwoo

AU - Ham, Moon Ho

AU - Lee, Woong

AU - Myoung, Jae Min

N1 - Funding Information: This work was supported by the Technology Innovation Program (Industrial Strategic technology development program, 10040741, Development of the Low Damage Sputtering Source for TCO Layers) funded by the Ministry of Knowledge Economy (MKE, Korea), the R&BD Program of MKE/KIAT (2010-8-1075), and WCU (World Class University) program through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology (R32-20031). M. Son and M.H. Ham acknowledge support by the WCU program through an NRF Grant (R31-10026) of MEST.

PY - 2012/10/15

Y1 - 2012/10/15

N2 - A simple but scalable approach to the production of surface-textured Al-doped ZnO(AZO) films for low-cost transparent electrode applications in thin-film solar cells is introduced in this study by combining pulsed dc magnetron sputtering (PDMS) with wet etching in sequence. First, structural, electrical, and optical properties of the AZO films prepared by a PDMS were investigated as functions of deposition temperature to obtain transparent electrode films that can be used as indium-free alternative to ITO electrodes. Increase in the deposition temperature to 230 °C accompanied the improvement in crystalline quality and doping efficiency, which enabled the lowest electrical resistivity of 4.16 × 10 -4 Ω cm with the carrier concentration of 1.65 × 10 21 cm -3 and Hall mobility of 11.3 cm 2 /V s. The wet etching of the films in a diluted HCl solution resulted in surface roughening via the formation of crater-like structures without significant degradation in the electrical properties, which is responsible for the enhanced light scattering capability required for anti-reflective electrodes in thin film solar cells.

AB - A simple but scalable approach to the production of surface-textured Al-doped ZnO(AZO) films for low-cost transparent electrode applications in thin-film solar cells is introduced in this study by combining pulsed dc magnetron sputtering (PDMS) with wet etching in sequence. First, structural, electrical, and optical properties of the AZO films prepared by a PDMS were investigated as functions of deposition temperature to obtain transparent electrode films that can be used as indium-free alternative to ITO electrodes. Increase in the deposition temperature to 230 °C accompanied the improvement in crystalline quality and doping efficiency, which enabled the lowest electrical resistivity of 4.16 × 10 -4 Ω cm with the carrier concentration of 1.65 × 10 21 cm -3 and Hall mobility of 11.3 cm 2 /V s. The wet etching of the films in a diluted HCl solution resulted in surface roughening via the formation of crater-like structures without significant degradation in the electrical properties, which is responsible for the enhanced light scattering capability required for anti-reflective electrodes in thin film solar cells.

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ER -

Effect of deposition temperature on the properties of Al-doped ZnO films prepared by pulsed DC magnetron sputtering for transparent electrodes in thin-film solar cells

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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