Abstract
We propose dual-wavelength Fourier ptychography for topographic measurement. To extend the axial measurement range, a single light-emitting diode (LED) and two appropriate bandpass filters are employed. This provides a speckle-free phase image, and reduces the possibility of a systematic error, which yields a high-quality topographic image. The proposed system can measure the surface topography in the range of nano- to micro-structures. The performance of the system is experimentally verified.
Original language | English |
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Pages (from-to) | 3526-3529 |
Number of pages | 4 |
Journal | Optics Letters |
Volume | 43 |
Issue number | 15 |
DOIs | |
Publication status | Published - 2018 Aug 1 |
Bibliographical note
Funding Information:Funding. National Research Foundation of Korea (NRF) (2015R1A5A1037668).
Publisher Copyright:
© 2018 Optical Society of America.
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics