Dose performance characterization of extreme ultraviolet exposure system using enhanced energy sensitivity by resist contrast method

Insung Kim, Jinseok Heo, Changmin Park, Myeongsu Hwang, Seong Sue Kim, Jae W. Hahn

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Dose performance characterization of extreme ultraviolet exposure system using enhanced energy sensitivity by resist contrast method'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Chemistry

Biochemistry, Genetics and Molecular Biology

Physics