Doped SnO2 Transparent Conductive Multilayer Thin Films Explored by Continuous Composition Spread

Jin Ju Lee; Jong Yoon Ha; Won Kook Choi; Yong Soo Cho; Ji Won Choi

doi:10.1021/co500185d

Doped SnO₂ Transparent Conductive Multilayer Thin Films Explored by Continuous Composition Spread

Jin Ju Lee, Jong Yoon Ha, Won Kook Choi, Yong Soo Cho, Ji Won Choi

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

Mn-doped SnO₂ thin films were fabricated by a continuous composition spread (CCS) method on a glass substrate at room temperature to find optimized compositions. The fabricated materials were found to have a lower resistivity than pure SnO₂ thin films because of oxygen vacancies generated by Mn doping. As Mn content was increased, resistivity was found to decrease for limited doping concentrations. The minimum thin film resistivity was 0.29 Ω-cm for a composition of 2.59 wt % Mn-doped SnO₂. The Sn-O vibrational stretching frequency in FT-IR showed a blue shift, consistent with oxygen deficiency. Mn-doped SnO₂/Ag/Mn-doped SnO₂ multilayer structures were fabricated using this optimized composition deposited by an on-axis radio frequency (RF) sputter. The multilayer transparent conducting oxide film had a resistivity of 7.35 × 10^-5 Ω-cm and an average transmittance above 86% in the 550 nm wavelength region. (Graph Presented).

Original language	English
Pages (from-to)	247-252
Number of pages	6
Journal	ACS Combinatorial Science
Volume	17
Issue number	4
DOIs	https://doi.org/10.1021/co500185d
Publication status	Published - 2015 Apr 13

Bibliographical note

Publisher Copyright:
© 2015 American Chemical Society.

All Science Journal Classification (ASJC) codes

Chemistry(all)

Access to Document

10.1021/co500185d

Cite this

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title = "Doped SnO2 Transparent Conductive Multilayer Thin Films Explored by Continuous Composition Spread",

abstract = "Mn-doped SnO2 thin films were fabricated by a continuous composition spread (CCS) method on a glass substrate at room temperature to find optimized compositions. The fabricated materials were found to have a lower resistivity than pure SnO2 thin films because of oxygen vacancies generated by Mn doping. As Mn content was increased, resistivity was found to decrease for limited doping concentrations. The minimum thin film resistivity was 0.29 Ω-cm for a composition of 2.59 wt % Mn-doped SnO2. The Sn-O vibrational stretching frequency in FT-IR showed a blue shift, consistent with oxygen deficiency. Mn-doped SnO2/Ag/Mn-doped SnO2 multilayer structures were fabricated using this optimized composition deposited by an on-axis radio frequency (RF) sputter. The multilayer transparent conducting oxide film had a resistivity of 7.35 × 10-5 Ω-cm and an average transmittance above 86% in the 550 nm wavelength region. (Graph Presented).",

author = "Lee, {Jin Ju} and Ha, {Jong Yoon} and Choi, {Won Kook} and Cho, {Yong Soo} and Choi, {Ji Won}",

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T1 - Doped SnO2 Transparent Conductive Multilayer Thin Films Explored by Continuous Composition Spread

AU - Lee, Jin Ju

AU - Ha, Jong Yoon

AU - Choi, Won Kook

AU - Cho, Yong Soo

AU - Choi, Ji Won

PY - 2015/4/13

Y1 - 2015/4/13

N2 - Mn-doped SnO2 thin films were fabricated by a continuous composition spread (CCS) method on a glass substrate at room temperature to find optimized compositions. The fabricated materials were found to have a lower resistivity than pure SnO2 thin films because of oxygen vacancies generated by Mn doping. As Mn content was increased, resistivity was found to decrease for limited doping concentrations. The minimum thin film resistivity was 0.29 Ω-cm for a composition of 2.59 wt % Mn-doped SnO2. The Sn-O vibrational stretching frequency in FT-IR showed a blue shift, consistent with oxygen deficiency. Mn-doped SnO2/Ag/Mn-doped SnO2 multilayer structures were fabricated using this optimized composition deposited by an on-axis radio frequency (RF) sputter. The multilayer transparent conducting oxide film had a resistivity of 7.35 × 10-5 Ω-cm and an average transmittance above 86% in the 550 nm wavelength region. (Graph Presented).

AB - Mn-doped SnO2 thin films were fabricated by a continuous composition spread (CCS) method on a glass substrate at room temperature to find optimized compositions. The fabricated materials were found to have a lower resistivity than pure SnO2 thin films because of oxygen vacancies generated by Mn doping. As Mn content was increased, resistivity was found to decrease for limited doping concentrations. The minimum thin film resistivity was 0.29 Ω-cm for a composition of 2.59 wt % Mn-doped SnO2. The Sn-O vibrational stretching frequency in FT-IR showed a blue shift, consistent with oxygen deficiency. Mn-doped SnO2/Ag/Mn-doped SnO2 multilayer structures were fabricated using this optimized composition deposited by an on-axis radio frequency (RF) sputter. The multilayer transparent conducting oxide film had a resistivity of 7.35 × 10-5 Ω-cm and an average transmittance above 86% in the 550 nm wavelength region. (Graph Presented).

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