Abstract
The direct synthesis and self-assembly of silicon nanowires to yield a two-terminal, nano-to-micro integrated system has been demonstrated. The process takes advantage of localized heating to initiate and sustain a bottom up nanowire synthesis mechanism. As soon as the nanowire synthesis process is complete, the integrated system is ready for characterization of mechanical and electrical properties as well as functionalization for sensing applications. The process is CMOS compatible and eliminates the nano-to-micro contact formation process that is currently required of traditional processes.
Original language | English |
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Pages | 525-531 |
Number of pages | 7 |
DOIs | |
Publication status | Published - 2004 |
Event | 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004 - Anaheim, CA, United States Duration: 2004 Nov 13 → 2004 Nov 19 |
Other
Other | 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004 |
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Country/Territory | United States |
City | Anaheim, CA |
Period | 04/11/13 → 04/11/19 |
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering