Direct synthesis and self-assembly of silicon nanowires

Ongi Englander, Dane Christensen, Jongbaeg Kim, Liwei Lin

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

The direct synthesis and self-assembly of silicon nanowires to yield a two-terminal, nano-to-micro integrated system has been demonstrated. The process takes advantage of localized heating to initiate and sustain a bottom up nanowire synthesis mechanism. As soon as the nanowire synthesis process is complete, the integrated system is ready for characterization of mechanical and electrical properties as well as functionalization for sensing applications. The process is CMOS compatible and eliminates the nano-to-micro contact formation process that is currently required of traditional processes.

Original languageEnglish
Pages525-531
Number of pages7
DOIs
Publication statusPublished - 2004
Event2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004 - Anaheim, CA, United States
Duration: 2004 Nov 132004 Nov 19

Other

Other2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004
Country/TerritoryUnited States
CityAnaheim, CA
Period04/11/1304/11/19

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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