Direct replication of a glass micro Fresnel zone plate array by laser irradiation using an infrared transmissive mold

Runjia Han; Juho Lee; Baekcheon Seong; Ryung Shin; Donghyun Kim; Changsu Park; Jiseok Lim; Chulmin Joo; Shinill Kang

doi:10.1364/OE.387213

Direct replication of a glass micro Fresnel zone plate array by laser irradiation using an infrared transmissive mold

Runjia Han, Juho Lee, Baekcheon Seong, Ryung Shin, Donghyun Kim, Changsu Park, Jiseok Lim, Chulmin Joo, Shinill Kang

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

It is not yet possible to fabricate micrometer-scale, glass optical components with nanometer-scale precision. Glass thermal imprinting enhances production efficiency. However, dimensional changes caused by shrinkage are inevitable because of phase transitions. Replication is very difficult when high-level pitch precision is essential. We used an infrared-transparent silicon mold and a CO2 laser to perform replica-type, thermal surface texturing at the nanoscale level; we analyzed a glass Fresnel zone plate array to this end. The Fresnel zone plate array was 10 × 10 mm² in area and featured a 20 × 20 array. The individual Fresnel zone plate diameter was 500 μm and had 21 rings of minimum linewidth 2.9 μm and height 737 nm.

Original language	English
Pages (from-to)	18468-18480
Number of pages	13
Journal	Optics Express
Volume	28
Issue number	12
DOIs	https://doi.org/10.1364/OE.387213
Publication status	Published - 2020 Jun 8

Bibliographical note

Funding Information:
National Research Foundation of Korea (2015R1A5A1037668); Ministry of Trade, Industry and Energy (N0002310).

Publisher Copyright:
© 2020 Optical Society of America.

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

Access to Document

10.1364/OE.387213

Cite this

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title = "Direct replication of a glass micro Fresnel zone plate array by laser irradiation using an infrared transmissive mold",

abstract = "It is not yet possible to fabricate micrometer-scale, glass optical components with nanometer-scale precision. Glass thermal imprinting enhances production efficiency. However, dimensional changes caused by shrinkage are inevitable because of phase transitions. Replication is very difficult when high-level pitch precision is essential. We used an infrared-transparent silicon mold and a CO2 laser to perform replica-type, thermal surface texturing at the nanoscale level; we analyzed a glass Fresnel zone plate array to this end. The Fresnel zone plate array was 10 × 10 mm2 in area and featured a 20 × 20 array. The individual Fresnel zone plate diameter was 500 μm and had 21 rings of minimum linewidth 2.9 μm and height 737 nm.",

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AU - Han, Runjia

AU - Lee, Juho

AU - Seong, Baekcheon

AU - Shin, Ryung

AU - Kim, Donghyun

AU - Park, Changsu

AU - Lim, Jiseok

AU - Joo, Chulmin

AU - Kang, Shinill

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Direct replication of a glass micro Fresnel zone plate array by laser irradiation using an infrared transmissive mold

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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