Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy

Jiseok Lim; Myungki Jung; Seo Young Hwang; Shinill Kang

doi:10.1116/1.4767639

Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy

Jiseok Lim, Myungki Jung, Seo Young Hwang, Shinill Kang

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Optical scanning confocal microscopy enables high-resolution imaging and optical sectioning for three-dimensional imaging. Technologies to improve confocal microscopy are being developed for applications, such as real-time bioinspection, fluorescence sample imaging, and ultra-high-resolution measurement. Recently, the need for high-resolution large-area inspection of electronics has been increasing rapidly, including large-area display panels. Therefore, the authors constructed an optical system for multi-optical-probe confocal microscopy. A 10 × 10 micro-objective-lens array was fabricated with high fidelity using an ultraviolet nanoimprinting process. To investigate the utility of this system, 1 × 1 mm² images were examined using an XY-translation nanostage scanning with a travel length of 100 μm.

Original language	English
Article number	06F702
Journal	Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume	30
Issue number	6
DOIs	https://doi.org/10.1116/1.4767639
Publication status	Published - 2012 Nov

Bibliographical note

Funding Information:
This research was supported by the Korea National Research Foundation grant funded by the Korean government (MEST) (No. 2011-0000305).

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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title = "Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy",

abstract = "Optical scanning confocal microscopy enables high-resolution imaging and optical sectioning for three-dimensional imaging. Technologies to improve confocal microscopy are being developed for applications, such as real-time bioinspection, fluorescence sample imaging, and ultra-high-resolution measurement. Recently, the need for high-resolution large-area inspection of electronics has been increasing rapidly, including large-area display panels. Therefore, the authors constructed an optical system for multi-optical-probe confocal microscopy. A 10 × 10 micro-objective-lens array was fabricated with high fidelity using an ultraviolet nanoimprinting process. To investigate the utility of this system, 1 × 1 mm2 images were examined using an XY-translation nanostage scanning with a travel length of 100 μm.",

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AU - Lim, Jiseok

AU - Jung, Myungki

AU - Young Hwang, Seo

AU - Kang, Shinill

N1 - Funding Information: This research was supported by the Korea National Research Foundation grant funded by the Korean government (MEST) (No. 2011-0000305).

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AB - Optical scanning confocal microscopy enables high-resolution imaging and optical sectioning for three-dimensional imaging. Technologies to improve confocal microscopy are being developed for applications, such as real-time bioinspection, fluorescence sample imaging, and ultra-high-resolution measurement. Recently, the need for high-resolution large-area inspection of electronics has been increasing rapidly, including large-area display panels. Therefore, the authors constructed an optical system for multi-optical-probe confocal microscopy. A 10 × 10 micro-objective-lens array was fabricated with high fidelity using an ultraviolet nanoimprinting process. To investigate the utility of this system, 1 × 1 mm2 images were examined using an XY-translation nanostage scanning with a travel length of 100 μm.

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Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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