Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes

J. I. Lee; S. Pyo; M. O. Kim; T. Chung; H. K. Lee; S. C. Lim; J. Park; J. Kim

doi:10.1109/MEMSYS.2013.6474170

Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes

J. I. Lee, S. Pyo, M. O. Kim, T. Chung, H. K. Lee, S. C. Lim, J. Park, J. Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	37-40
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474170
Publication status	Published - 2013
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: 2013 Jan 20 → 2013 Jan 24

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan, Province of China
City	Taipei
Period	13/1/20 → 13/1/24

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2013.6474170

Cite this

Lee, J. I., Pyo, S., Kim, M. O., Chung, T., Lee, H. K., Lim, S. C., Park, J., & Kim, J. (2013). Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 37-40). Article 6474170 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474170

@inproceedings{540176049efd44628a57425c4884a0bf,

title = "Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes",

abstract = "We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.",

author = "Lee, {J. I.} and S. Pyo and Kim, {M. O.} and T. Chung and Lee, {H. K.} and Lim, {S. C.} and J. Park and J. Kim",

year = "2013",

doi = "10.1109/MEMSYS.2013.6474170",

language = "English",

isbn = "9781467356558",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "37--40",

booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

}

Lee, JI, Pyo, S, Kim, MO, Chung, T, Lee, HK, Lim, SC, Park, J & Kim, J 2013, Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474170, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 37-40, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 13/1/20. https://doi.org/10.1109/MEMSYS.2013.6474170

Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. / Lee, J. I.; Pyo, S.; Kim, M. O. et al.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 37-40 6474170 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes

AU - Lee, J. I.

AU - Pyo, S.

AU - Kim, M. O.

AU - Chung, T.

AU - Lee, H. K.

AU - Lim, S. C.

AU - Park, J.

AU - Kim, J.

PY - 2013

Y1 - 2013

N2 - We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.

AB - We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.

UR - http://www.scopus.com/inward/record.url?scp=84875480045&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84875480045&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2013.6474170

DO - 10.1109/MEMSYS.2013.6474170

M3 - Conference contribution

AN - SCOPUS:84875480045

SN - 9781467356558

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 37

EP - 40

BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

Y2 - 20 January 2013 through 24 January 2013

ER -

Lee JI, Pyo S, Kim MO, Chung T, Lee HK, Lim SC et al. Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 37-40. 6474170. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2013.6474170

Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes

Abstract

Publication series

Other

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this