@inproceedings{6971fbaf13e942f9a7ced38f98526645,
title = "Development of 3-axis nano stage for precision positioning in lithography system",
abstract = "The precision positioning system requires robust structural design to obtain enough bandwidth and efficient magnetic circuit to have fast access time. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE) based on specifications of our precision positioning device. Finally, it was checked that the designed actuator had the proper dynamic characteristics through dynamic experiments.",
author = "Lee, {Dong Ju} and Lee, {Kang Nyung} and Park, {No Cheol} and Park, {Young Pil} and Hyuk Kim and Lee, {Suk Won} and Choi, {Hyoung Gil} and Lee, {Moon Gu} and Jiho Uh and Park, {Jung Woo} and Choi, {Yong Hwan} and Lee, {Dong Jin}",
year = "2005",
language = "English",
isbn = "0780390458",
series = "IEEE International Conference on Mechatronics and Automation, ICMA 2005",
pages = "1598--1603",
booktitle = "IEEE International Conference on Mechatronics and Automation, ICMA 2005",
note = "IEEE International Conference on Mechatronics and Automation, ICMA 2005 ; Conference date: 29-07-2005 Through 01-08-2005",
}