Design of surface micro-structures for friction control in micro-systems applications

D. E. Kim, K. H. Cha, I. H. Sung, J. Bryan

Research output: Contribution to journalArticlepeer-review

48 Citations (Scopus)


In this work, the effectiveness of controlling the frictional force at the micro-scale using well structured surface micro-grooves is demonstrated. Such micro-structured surfaces are designed to eliminate wear particles or contaminants from the sliding interface, thereby, minimizing the effect of surface plowing. Also, the surfaces are designed to minimize the effective area of contact, which is found to have a profound effect on the magnitude of the surface force for micro-systems. Experimental evidence of stiction/friction reduction even at high relative humidity by using such micro-structured surfaces are provided in this work. The results of this work can be utilized in optimization of tribological surface design for micro-systems applications.

Original languageEnglish
Pages (from-to)495-498
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Issue number1
Publication statusPublished - 2002

Bibliographical note

Funding Information:
5 ACKNOWLEDGMENTS The authors wish to acknowledge that this paper is a result of the research accomplished with the financial supports of Critical Technology 21 program (Machinery Design Technology Enhancement) and the Intelligent Microsystem Center, Seoul, Korea, which is carrying out one of the 21st century's New Frontier R&D Projects sponsored by the Korea Ministry of Science & Technology.

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering


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