Abstract
The micro positioning systems using magnetic suspension technique, which is one of precision actuating method, have been suggested. Utilizing the various potentials such as the exclusion of a mechanical friction, they are being applied broadly to multi degrees of freedom (d.o.f) system requesting high accuracy or hybrid system requesting to be controlled position and force simultaneously. This paper presents the entire development procedure of a novel six d.o.f micro positioning system using magnetic levitation, with a repulsive force mechanism covering the all d.o.f. First, the interactions between magnetic elements are modeled and the system design flow by an optimal location of the elements is given. A kinematic relationship between the measuring instruments and the levitated object is derived, and dynamic characteristics are identified by the narrow gap principles. And the main issues for control are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 1937-1948 |
| Number of pages | 12 |
| Journal | IEICE Transactions on Electronics |
| Volume | E83-C |
| Issue number | 12 |
| Publication status | Published - 2000 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering