TY - GEN
T1 - Design and fabrication of microlens illuminated aperture array for optical ROM card system
AU - Kim, Hongmin
AU - Lee, Jeeseung
AU - Lim, Jiseok
AU - Kim, Seok Min
AU - Kang, Shinill
AU - Hendriks, Rob
AU - Kastelijn, Aukje
AU - Busch, Christopher
PY - 2005/1/1
Y1 - 2005/1/1
N2 - In the present study, a microlens illuminated aperture array for optical ROM card system was designed and fabricated using monolithic lithography integration method. Microlens array placed on the array was designed to increase the intensity of light passing the array of apertures with a diameter of 1μm and a period of 15μm. And then Microlens array was fabricated using UV molding as a mean of monolithic lithography integration on aluminum aperture array fabricated using photolithography and reactive ion etching process. Optical properties of the generated optical probes at Talbot distance from aperture array and microlens illuminated aperture array array were measured and compared. The maximum intensity of optical probes of microlens illuminated aperture array increased about 12 times of that of aperture array.
AB - In the present study, a microlens illuminated aperture array for optical ROM card system was designed and fabricated using monolithic lithography integration method. Microlens array placed on the array was designed to increase the intensity of light passing the array of apertures with a diameter of 1μm and a period of 15μm. And then Microlens array was fabricated using UV molding as a mean of monolithic lithography integration on aluminum aperture array fabricated using photolithography and reactive ion etching process. Optical properties of the generated optical probes at Talbot distance from aperture array and microlens illuminated aperture array array were measured and compared. The maximum intensity of optical probes of microlens illuminated aperture array increased about 12 times of that of aperture array.
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M3 - Conference contribution
SN - 1557527946
SN - 9781557527943
T3 - Optics InfoBase Conference Papers
BT - International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2005
PB - Optical Society of America
T2 - International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2005
Y2 - 10 July 2005 through 10 July 2005
ER -