Design and characterization of low-loss and low-dispersion micromachined elevated CPW

Sang No Lee; Yong Jun Kim; Jong Gwan Yook

doi:10.1002/mop.11159

Design and characterization of low-loss and low-dispersion micromachined elevated CPW

Sang No Lee, Yong Jun Kim, Jong Gwan Yook

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

In this paper, the performance of a 10-μm-elevated low-loss and low-dispersion elevated coplanar waveguide (ECPW) is presented. It is shown that a wide range of characteristic impedances, encompassing the 40-100Ω range, is obtainable. A very low effective dielectric constant (close to 1) is predicted based on the 3D finite-difference time-domain (FDTD) method and confirmed by measurement. The overlapped configuration on standard silicon reveals the best performance, with a loss of about 0.2 dB/mm, which is much lower than that of a conventional CPW at 40 GHz.

Original language	English
Pages (from-to)	169-171
Number of pages	3
Journal	Microwave and Optical Technology Letters
Volume	39
Issue number	3
DOIs	https://doi.org/10.1002/mop.11159
Publication status	Published - 2003 Nov 5

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1002/mop.11159

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title = "Design and characterization of low-loss and low-dispersion micromachined elevated CPW",

abstract = "In this paper, the performance of a 10-μm-elevated low-loss and low-dispersion elevated coplanar waveguide (ECPW) is presented. It is shown that a wide range of characteristic impedances, encompassing the 40-100Ω range, is obtainable. A very low effective dielectric constant (close to 1) is predicted based on the 3D finite-difference time-domain (FDTD) method and confirmed by measurement. The overlapped configuration on standard silicon reveals the best performance, with a loss of about 0.2 dB/mm, which is much lower than that of a conventional CPW at 40 GHz.",

author = "Lee, {Sang No} and Kim, {Yong Jun} and Yook, {Jong Gwan}",

year = "2003",

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AU - Kim, Yong Jun

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N2 - In this paper, the performance of a 10-μm-elevated low-loss and low-dispersion elevated coplanar waveguide (ECPW) is presented. It is shown that a wide range of characteristic impedances, encompassing the 40-100Ω range, is obtainable. A very low effective dielectric constant (close to 1) is predicted based on the 3D finite-difference time-domain (FDTD) method and confirmed by measurement. The overlapped configuration on standard silicon reveals the best performance, with a loss of about 0.2 dB/mm, which is much lower than that of a conventional CPW at 40 GHz.

AB - In this paper, the performance of a 10-μm-elevated low-loss and low-dispersion elevated coplanar waveguide (ECPW) is presented. It is shown that a wide range of characteristic impedances, encompassing the 40-100Ω range, is obtainable. A very low effective dielectric constant (close to 1) is predicted based on the 3D finite-difference time-domain (FDTD) method and confirmed by measurement. The overlapped configuration on standard silicon reveals the best performance, with a loss of about 0.2 dB/mm, which is much lower than that of a conventional CPW at 40 GHz.

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JF - Microwave and Optical Technology Letters

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ER -

Design and characterization of low-loss and low-dispersion micromachined elevated CPW

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