TY - JOUR
T1 - Dependence of processing parameters on structural properties and microstructures of pulsed laser deposited LiMn2O4 thin films
AU - Shin, Dong Wook
AU - Gupta, Ravindra K.
AU - Choi, Won Kook
AU - Cho, Yong Soo
AU - Yoon, Seok Jin
AU - Choi, Ji Won
PY - 2009/7
Y1 - 2009/7
N2 - LiMn2O4 thin films grown on a Pt/Ti/SiO 2/Si(100) substrate by pulsed laser deposition were studied with focusing on the effects of growth parameters on crystallographic and structural characteristics. The growth parameters, namely oxygen pressure, target-substrate distance, laser energy density, pulse frequency and substrate temperature were established in a sequential manner to obtain smooth, dense and single-phase LiMn2O4 films. The smooth, dense LiMn2O 4 single-phase thin films were found to show the improved cycle performance of cathode of thin film battery.
AB - LiMn2O4 thin films grown on a Pt/Ti/SiO 2/Si(100) substrate by pulsed laser deposition were studied with focusing on the effects of growth parameters on crystallographic and structural characteristics. The growth parameters, namely oxygen pressure, target-substrate distance, laser energy density, pulse frequency and substrate temperature were established in a sequential manner to obtain smooth, dense and single-phase LiMn2O4 films. The smooth, dense LiMn2O 4 single-phase thin films were found to show the improved cycle performance of cathode of thin film battery.
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U2 - 10.1143/JJAP.48.075501
DO - 10.1143/JJAP.48.075501
M3 - Article
AN - SCOPUS:72049088240
SN - 0021-4922
VL - 48
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 7 PART 1
M1 - 075501
ER -