Deep-UV Transparent Conducting Oxide La-Doped SrSnO3with a High Figure of Merit

Juhan Kim, Hwanhui Yun, Jihoon Seo, Jae Ha Kim, Jae Hoon Kim, K. Andre Mkhoyan, Bongju Kim, Kookrin Char

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7 Citations (Scopus)


Perovskite stannate SrSnO3(SSO) is attracting attention as ultraviolet transparent conducting oxides (UV TCOs) due to its ultrawide band gap and high conductivity. Here, we investigate in detail the thickness-dependent electrical, structural, and optical properties of sequentially strain-relaxed La-doped SrSnO3(SLSO) epitaxial thin films. We find that the SLSO films grow as an orthorhombic Pnma phase with a-a-c+in the c+direction under the tensile strain. With the strain relaxation, as the films become thicker, vertical grain boundaries are created and the orthorhombic phase becomes reoriented to all three possible orientations. Simultaneously, the conductance starts to deviate from the linear behavior with increasing film thickness. Through the analysis of thickness fringes in optical transmittance, we found that a 120 nm thick nominally 4% La-doped SrSnO3film has a figure of merit (φTC= 2.65 × 10-3ω-1) at λ = 300 nm in the deep-UV region, which is the highest value among the well-known candidates for UV TCOs reported to date.

Original languageEnglish
Pages (from-to)3623-3631
Number of pages9
JournalACS Applied Electronic Materials
Issue number7
Publication statusPublished - 2022 Jul 26

Bibliographical note

Publisher Copyright:
© 2022 American Chemical Society.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Electrochemistry


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