Convolutional Neural Network for Wafer Surface Defect Classification and the Detection of Unknown Defect Class

Engineering

• Defect Classification 100%
• Convolutional Neural Network 30%
• Classification Method 30%
• Defects 30%
• Surface Defect 20%
• Fabrication 10%
• Algorithm 10%
• Dataset 10%
• Feature Extraction 10%
• Classification Performance 10%
• Detection Performance 10%
• Image Recognition 10%
• Scanning Electron Microscope 10%
• Effective Feature 10%
• Naked Eye 10%
• Machine Learning Technique 10%
• Damage Surface 10%
• Models 10%
• Deep Learning 10%
• Detection 10%
• Classification 10%
• Experiments 10%
• Determines 10%
• Defect Detection 10%
• Additional Feature 10%
• Site Work 10%

Computer Science

• Classes 40%
• Classification Method 30%
• Convolutional Neural Network 30%
• Classification 10%
• Classification Performance 10%
• Detection Performance 10%
• Machine Learning Technique 10%
• Simulation Mode 10%
• Neural Network Model 10%
• Microscope Image 10%
• Feature Extraction 10%
• Detection 10%