Control of glass infiltration at the Al₂O₃/Glass/Al₂O₃ interface

A zero-shrinkage sintering process in which the shrinkage of the x-y axis is controlled to be zero is in great demand due to the high integration trend in ceramic modules. Among the zero-shrinkage sintering processes available, the glass infiltration method proposed in the preliminary study with an Al₂O₃/Glass/Al₂O₃ structure is one promising method. However, problems exist in regard to the glass infiltration method, including partially incomplete joining between Al₂O₃ and glass layers due to the precipitate of Ti-Pb rich phase during the sintering process. Therefore, we wish to solve the de-lamination problems and suggest a mechanism for delamination and the solutions in the zeroshrinkage low temperature co-fired ceramic (LTCC) layers. The de-lamination. problems diminished using the Pb-BSi-O glass without TiO₂ in Pb-B-Ti-Si-O glass and produced a very dense zero-shrinkage LTCC.