Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Suho Ahn; Joowon Cha; Ho Myung; Seok Min Kim; Shinill Kang

doi:10.1063/1.2392960

Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Suho Ahn, Joowon Cha, Ho Myung, Seok Min Kim, Shinill Kang

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

104 Citations (Scopus)

Abstract

With the increasing demand for large-scale nano- and micropatterns in the field of digital displays, nano- and micropattern replication technology has become a research priority. In this study, a continuous ultraviolet (UV) roll nanoimprinting process using a pattern roll stamper for the replication of large-scale nano- and micropatterns was designed and constructed. Several flexible nano- and micropatterns with large areas were fabricated and analyzed as tests of this continuous UV imprinting process.

Original language	English
Article number	213101
Journal	Applied Physics Letters
Volume	89
Issue number	21
DOIs	https://doi.org/10.1063/1.2392960
Publication status	Published - 2006

Bibliographical note

Funding Information:
This research was supported by a grant from the National Research Laboratory program (M10400000321-05J0000-32110), which is supported by the Ministry of Science and Technology, Korea.

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2392960

Cite this

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title = "Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns",

abstract = "With the increasing demand for large-scale nano- and micropatterns in the field of digital displays, nano- and micropattern replication technology has become a research priority. In this study, a continuous ultraviolet (UV) roll nanoimprinting process using a pattern roll stamper for the replication of large-scale nano- and micropatterns was designed and constructed. Several flexible nano- and micropatterns with large areas were fabricated and analyzed as tests of this continuous UV imprinting process.",

author = "Suho Ahn and Joowon Cha and Ho Myung and Kim, {Seok Min} and Shinill Kang",

note = "Funding Information: This research was supported by a grant from the National Research Laboratory program (M10400000321-05J0000-32110), which is supported by the Ministry of Science and Technology, Korea.",

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AU - Ahn, Suho

AU - Cha, Joowon

AU - Myung, Ho

AU - Kim, Seok Min

AU - Kang, Shinill

N1 - Funding Information: This research was supported by a grant from the National Research Laboratory program (M10400000321-05J0000-32110), which is supported by the Ministry of Science and Technology, Korea.

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AB - With the increasing demand for large-scale nano- and micropatterns in the field of digital displays, nano- and micropattern replication technology has become a research priority. In this study, a continuous ultraviolet (UV) roll nanoimprinting process using a pattern roll stamper for the replication of large-scale nano- and micropatterns was designed and constructed. Several flexible nano- and micropatterns with large areas were fabricated and analyzed as tests of this continuous UV imprinting process.

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Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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