In this study, we develop an optical contact probe array for scanning near-field lithography. We fabricate the optical probes with a pyramidal tip array on an aluminium/silicon nitride composite membrane. Here, we reduce the contact pressure using the corrugations on the silicon nitride membrane and the flattened surface on top of the tip. After fabricating the 5 5 probes in the array, we evaluate the contact pressure using the force-distance curve obtained by an atomic force microscope. The spring constants of the corrugated membranes are 10 0.6 N m-1. The contact pressure on a flattened 295 nm in-radius is calculated to be approximately 33 MPa for a 300 nm deflection. This value is 22 times smaller than that of a sharp pyramidal tip of 20 nm in-radius on a flat membrane.
|Journal||Journal of Micromechanics and Microengineering|
|Publication status||Published - 2017 Mar 10|
Bibliographical noteFunding Information:
This work was supported by the National Research Foundation of Korea (NRF) Grant funded by the Korea government (MSIP) (No. NRF-2015R1A2A1A03064460).
© 2017 IOP Publishing Ltd.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering