Contact-pressure reduction of pyramidal optical probe array on corrugated aluminium/silicon nitride membranes

Jinhee Jang, Seonghyeon Oh, Jae W. Hahn

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


In this study, we develop an optical contact probe array for scanning near-field lithography. We fabricate the optical probes with a pyramidal tip array on an aluminium/silicon nitride composite membrane. Here, we reduce the contact pressure using the corrugations on the silicon nitride membrane and the flattened surface on top of the tip. After fabricating the 5 5 probes in the array, we evaluate the contact pressure using the force-distance curve obtained by an atomic force microscope. The spring constants of the corrugated membranes are 10 0.6 N m-1. The contact pressure on a flattened 295 nm in-radius is calculated to be approximately 33 MPa for a 300 nm deflection. This value is 22 times smaller than that of a sharp pyramidal tip of 20 nm in-radius on a flat membrane.

Original languageEnglish
Article number045014
JournalJournal of Micromechanics and Microengineering
Issue number4
Publication statusPublished - 2017 Mar 10

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRF) Grant funded by the Korea government (MSIP) (No. NRF-2015R1A2A1A03064460).

Publisher Copyright:
© 2017 IOP Publishing Ltd.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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