In this paper, we introduce a contact-free moving-magnet type of positioner that uses magnetic levitation to eliminate friction, the major limiting factor to high resolution on the micro-manufacturing level. The promising magnetic structure consists of permanent magnets mounted on the stage and air-core solenoids, with little uncertainty, fixed on the stator. Since magnetically levitated systems are inherently unstable, the design concept focuses on stability. Combining the above elements with the repulsive force property, we suggest a novel six degrees-of-freedom Maglev positioner stabilized with minimum sensory feedback in space and have formulated the dynamic equation of the system by the linear perturbation technique. The chief design parameters are optimized to maximize the stable boundary. We present test results to verify the dynamic characteristics.
Bibliographical noteFunding Information:
Manuscript received January 29, 2001; revised January 23, 2002. This work was supported by the Basic Research Program of Korea Science and Engineering Foundation (KOSEF) under Grant 2000-1-30400-009-3. K. S. Jung is with LG-PRC (Production engineering Research Center), Kyunggi-Do 451-713, Korea (e-mail: email@example.com). Y. S. Baek is with School of Electrical & Mechanical Engineering, Yonsei University, Seoul 120-749, Korea (e-mail: firstname.lastname@example.org). Publisher Item Identifier S 0018-9464(02)03629-4.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering