Conformal doping strategy for fin structures: tailoring of dopant profile through multiple monolayer doping and capping layer control

Chul Jin Park, Sang Min Jung, Jin Hwan Kim, Moo Whan Shin

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Conformal doping strategy for fin structures: tailoring of dopant profile through multiple monolayer doping and capping layer control'. Together they form a unique fingerprint.

Chemistry

Engineering

Biochemistry, Genetics and Molecular Biology

Material Science