Comparison of titanium oxide films grown on bare glass and boiled glass in 50% H2SO4 by metal-organic chemical vapor deposition

H. K. Jang; S. W. Whangbo; Y. D. Chung; T. G. Kim; H. B. Kim; I. W. Lyo; C. N. Whang; C. H. Wang; D. J. Choi; T. K. Kim; H. S. Lee

doi:10.1116/1.1288137

Comparison of titanium oxide films grown on bare glass and boiled glass in 50% H₂SO₄ by metal-organic chemical vapor deposition

H. K. Jang, S. W. Whangbo, Y. D. Chung, T. G. Kim, H. B. Kim, I. W. Lyo, C. N. Whang, C. H. Wang, D. J. Choi, T. K. Kim, H. S. Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

3 Citations (Scopus)

Abstract

The effect of chemical etching of the glass substrate with sulfuric acid on the thermal stability of the titanium oxide thin film prepared by metal organic chemical vapor deposition (MOCVD) at the temperature range of 300-350 °C is investigated. The thickness and stoichiometry of the films were studied by Rutherford backscattering spectrometry (RBS) and the thermal stability of the films were examined with x-ray photoelectron spectroscopy (XPS). Boiling the glass in sulfuric acid was found to be an effective method to extract the sodium and calcium in the glass, and was found to suppress the out-diffusion of sodium and calcium in the titanium oxide.

Original language	English
Pages (from-to)	2394-2399
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	18
Issue number	5
DOIs	https://doi.org/10.1116/1.1288137
Publication status	Published - 2000 Sept
Event	47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing - Boston, USA Duration: 2000 Oct 2 → 2000 Oct 6

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1116/1.1288137

Cite this

Jang, H. K., Whangbo, S. W., Chung, Y. D., Kim, T. G., Kim, H. B., Lyo, I. W., Whang, C. N., Wang, C. H., Choi, D. J., Kim, T. K., & Lee, H. S. (2000). Comparison of titanium oxide films grown on bare glass and boiled glass in 50% H₂SO₄ by metal-organic chemical vapor deposition. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 18(5), 2394-2399. https://doi.org/10.1116/1.1288137

@article{a89be187632249e6b104af44d9f0587d,

title = "Comparison of titanium oxide films grown on bare glass and boiled glass in 50% H2SO4 by metal-organic chemical vapor deposition",

abstract = "The effect of chemical etching of the glass substrate with sulfuric acid on the thermal stability of the titanium oxide thin film prepared by metal organic chemical vapor deposition (MOCVD) at the temperature range of 300-350 °C is investigated. The thickness and stoichiometry of the films were studied by Rutherford backscattering spectrometry (RBS) and the thermal stability of the films were examined with x-ray photoelectron spectroscopy (XPS). Boiling the glass in sulfuric acid was found to be an effective method to extract the sodium and calcium in the glass, and was found to suppress the out-diffusion of sodium and calcium in the titanium oxide.",

author = "Jang, {H. K.} and Whangbo, {S. W.} and Chung, {Y. D.} and Kim, {T. G.} and Kim, {H. B.} and Lyo, {I. W.} and Whang, {C. N.} and Wang, {C. H.} and Choi, {D. J.} and Kim, {T. K.} and Lee, {H. S.}",

year = "2000",

month = sep,

doi = "10.1116/1.1288137",

language = "English",

volume = "18",

pages = "2394--2399",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "5",

note = "47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing ; Conference date: 02-10-2000 Through 06-10-2000",

}

Jang, HK, Whangbo, SW, Chung, YD, Kim, TG, Kim, HB, Lyo, IW, Whang, CN, Wang, CH, Choi, DJ, Kim, TK & Lee, HS 2000, 'Comparison of titanium oxide films grown on bare glass and boiled glass in 50% H₂SO₄ by metal-organic chemical vapor deposition', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 18, no. 5, pp. 2394-2399. https://doi.org/10.1116/1.1288137

Comparison of titanium oxide films grown on bare glass and boiled glass in 50% H₂SO₄ by metal-organic chemical vapor deposition. / Jang, H. K.; Whangbo, S. W.; Chung, Y. D. et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 18, No. 5, 09.2000, p. 2394-2399.

Research output: Contribution to journal › Conference article › peer-review

TY - JOUR

T1 - Comparison of titanium oxide films grown on bare glass and boiled glass in 50% H2SO4 by metal-organic chemical vapor deposition

AU - Jang, H. K.

AU - Whangbo, S. W.

AU - Chung, Y. D.

AU - Kim, T. G.

AU - Kim, H. B.

AU - Lyo, I. W.

AU - Whang, C. N.

AU - Wang, C. H.

AU - Choi, D. J.

AU - Kim, T. K.

AU - Lee, H. S.

PY - 2000/9

Y1 - 2000/9

N2 - The effect of chemical etching of the glass substrate with sulfuric acid on the thermal stability of the titanium oxide thin film prepared by metal organic chemical vapor deposition (MOCVD) at the temperature range of 300-350 °C is investigated. The thickness and stoichiometry of the films were studied by Rutherford backscattering spectrometry (RBS) and the thermal stability of the films were examined with x-ray photoelectron spectroscopy (XPS). Boiling the glass in sulfuric acid was found to be an effective method to extract the sodium and calcium in the glass, and was found to suppress the out-diffusion of sodium and calcium in the titanium oxide.

AB - The effect of chemical etching of the glass substrate with sulfuric acid on the thermal stability of the titanium oxide thin film prepared by metal organic chemical vapor deposition (MOCVD) at the temperature range of 300-350 °C is investigated. The thickness and stoichiometry of the films were studied by Rutherford backscattering spectrometry (RBS) and the thermal stability of the films were examined with x-ray photoelectron spectroscopy (XPS). Boiling the glass in sulfuric acid was found to be an effective method to extract the sodium and calcium in the glass, and was found to suppress the out-diffusion of sodium and calcium in the titanium oxide.

UR - http://www.scopus.com/inward/record.url?scp=0034272595&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034272595&partnerID=8YFLogxK

U2 - 10.1116/1.1288137

DO - 10.1116/1.1288137

M3 - Conference article

AN - SCOPUS:0034272595

SN - 0734-2101

VL - 18

SP - 2394

EP - 2399

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 5

T2 - 47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing

Y2 - 2 October 2000 through 6 October 2000

ER -

Comparison of titanium oxide films grown on bare glass and boiled glass in 50% H₂SO₄ by metal-organic chemical vapor deposition

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this