Comparative studies of atomic layer deposition and plasma-enhanced atomic layer deposition Ta2O5 and the effects on electrical properties of In situ nitridation

Wan Joo Maeng, Jae Woong Lee, Jae Min Myoung, Hyungjun Kim

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Comparative studies of atomic layer deposition and plasma-enhanced atomic layer deposition Ta2O5 and the effects on electrical properties of In situ nitridation'. Together they form a unique fingerprint.

Material Science