CO gas sensing properties of direct-patternable TiO2 thin films containing multi-wall carbon nanotubes

Hyuncheol Kim; Min Hee Hong; Ho Won Jang; Seok Jin Yoon; Hyung Ho Park

doi:10.1016/j.tsf.2012.07.062

CO gas sensing properties of direct-patternable TiO₂ thin films containing multi-wall carbon nanotubes

Hyuncheol Kim, Min Hee Hong, Ho Won Jang, Seok Jin Yoon, Hyung Ho Park

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

The sensing properties of direct-patternable TiO₂ thin films prepared by photochemical solution deposition were improved by the incorporation of multi-wall carbon nanotubes (MWCNTs). Upon incorporation of the MWCNTs, the crystallinity of the TiO₂ thin films containing MWCNTs did not change. However, the electron conductivity was improved due to the π-bond nature of the MWCNT surface. In addition, an increase in the oxidation ratio on the surface of the TiO₂ thin films upon MWCNT incorporation caused an increase in surface area. Because of the high electron conductivity and surface area of the MWCNT-incorporated TiO₂ sensor, the sensitivity of the sensor was enhanced from 2.19 to 89.2. Direct-patterning of MWCNT-incorporated TiO₂ thin films can be performed without a photoresist or etching process. These results suggest that a micro-patterned sensor can be simply fabricated at a low cost and the sensitivity of TiO₂ thin films can be improved by incorporating MWCNTs.

Original language	English
Pages (from-to)	89-93
Number of pages	5
Journal	Thin Solid Films
Volume	529
DOIs	https://doi.org/10.1016/j.tsf.2012.07.062
Publication status	Published - 2013 Feb 1

Bibliographical note

Funding Information:
This study was supported by a grant from the Fundamental R&D Program (grant no. K0004114 ) for Core Technology of Materials funded by the Ministry of Knowledge Economy, Republic of Korea . This work (grant no. 00045405 ) was supported by Business for Cooperative R&D between Industry, Academy, and Research Institute funded by the Korea Small and Medium Business Administration in 2011.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2012.07.062

Cite this

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title = "CO gas sensing properties of direct-patternable TiO2 thin films containing multi-wall carbon nanotubes",

abstract = "The sensing properties of direct-patternable TiO2 thin films prepared by photochemical solution deposition were improved by the incorporation of multi-wall carbon nanotubes (MWCNTs). Upon incorporation of the MWCNTs, the crystallinity of the TiO2 thin films containing MWCNTs did not change. However, the electron conductivity was improved due to the π-bond nature of the MWCNT surface. In addition, an increase in the oxidation ratio on the surface of the TiO2 thin films upon MWCNT incorporation caused an increase in surface area. Because of the high electron conductivity and surface area of the MWCNT-incorporated TiO2 sensor, the sensitivity of the sensor was enhanced from 2.19 to 89.2. Direct-patterning of MWCNT-incorporated TiO2 thin films can be performed without a photoresist or etching process. These results suggest that a micro-patterned sensor can be simply fabricated at a low cost and the sensitivity of TiO2 thin films can be improved by incorporating MWCNTs.",

author = "Hyuncheol Kim and Hong, {Min Hee} and Jang, {Ho Won} and Yoon, {Seok Jin} and Park, {Hyung Ho}",

note = "Funding Information: This study was supported by a grant from the Fundamental R&D Program (grant no. K0004114 ) for Core Technology of Materials funded by the Ministry of Knowledge Economy, Republic of Korea . This work (grant no. 00045405 ) was supported by Business for Cooperative R&D between Industry, Academy, and Research Institute funded by the Korea Small and Medium Business Administration in 2011.",

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AU - Yoon, Seok Jin

AU - Park, Hyung Ho

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N2 - The sensing properties of direct-patternable TiO2 thin films prepared by photochemical solution deposition were improved by the incorporation of multi-wall carbon nanotubes (MWCNTs). Upon incorporation of the MWCNTs, the crystallinity of the TiO2 thin films containing MWCNTs did not change. However, the electron conductivity was improved due to the π-bond nature of the MWCNT surface. In addition, an increase in the oxidation ratio on the surface of the TiO2 thin films upon MWCNT incorporation caused an increase in surface area. Because of the high electron conductivity and surface area of the MWCNT-incorporated TiO2 sensor, the sensitivity of the sensor was enhanced from 2.19 to 89.2. Direct-patterning of MWCNT-incorporated TiO2 thin films can be performed without a photoresist or etching process. These results suggest that a micro-patterned sensor can be simply fabricated at a low cost and the sensitivity of TiO2 thin films can be improved by incorporating MWCNTs.

AB - The sensing properties of direct-patternable TiO2 thin films prepared by photochemical solution deposition were improved by the incorporation of multi-wall carbon nanotubes (MWCNTs). Upon incorporation of the MWCNTs, the crystallinity of the TiO2 thin films containing MWCNTs did not change. However, the electron conductivity was improved due to the π-bond nature of the MWCNT surface. In addition, an increase in the oxidation ratio on the surface of the TiO2 thin films upon MWCNT incorporation caused an increase in surface area. Because of the high electron conductivity and surface area of the MWCNT-incorporated TiO2 sensor, the sensitivity of the sensor was enhanced from 2.19 to 89.2. Direct-patterning of MWCNT-incorporated TiO2 thin films can be performed without a photoresist or etching process. These results suggest that a micro-patterned sensor can be simply fabricated at a low cost and the sensitivity of TiO2 thin films can be improved by incorporating MWCNTs.

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