Characterization of PLZT thin film prepared by photochemical deposition using photosensitive metal-organic precursors

Hyeong Ho Park, Woo Sik Kim, Jun Kyu Yang, Hyung Ho Park, Ross H. Hill

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21 Citations (Scopus)


The electrical properties of lanthanum doped lead zirconate titanate (PLZT) thin films prepared by photochemical metal-organic deposition (PMOD) using photosensitive starting precursors have been characterized. PLZT films with various La concentration were prepared by PMOD on Si(1 0 0) for observing the image of self-patterned PLZT film or on Pt(1 1 1)/Ti/SiO2/Si(1 0 0) for ferroelectric properties measurement. Even though PLZT film with 0 mol% of La, strictly PZT, showed an asymmetric behavior in polarization-voltage (P-E) relation, PLZT film by doping La showed symmetric behavior in P-E relation. The amelioration of electric and ferroelectric properties with increased substitution of La in PLZT film was observed, especially with 3 mol% La doped PLZT film, the most characteristic P-E hysteresis loop in the point of imprint property was obtained with comparatively large remnant polarization, 30 μC/cm2 at 15 V. Also, capacitance and leakage current behavior of PLZT film were revealed to be sensitive to the contents of La.

Original languageEnglish
Pages (from-to)215-220
Number of pages6
JournalMicroelectronic Engineering
Issue number2
Publication statusPublished - 2004 Feb

Bibliographical note

Funding Information:
This work was supported by Grant No. R01-2000-000-00244-0 from the Basic Research Program of the Korea Science & Engineering Foundation.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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