Abstract
The CF4 plasma treatment of indium-tin-oxide (ITO) greatly improves the performance of organic light-emitting diodes (OLEDs). The effects of plasma treatment on the chemical composition change and device performance were investigated by X-ray photoemission spectroscopy (XPS). The present results suggest that fluorine directly bonded to indium or tin on the ITO surface and markedly enhanced device performance.
Original language | English |
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Pages (from-to) | 6814-6816 |
Number of pages | 3 |
Journal | Japanese Journal of Applied Physics |
Volume | 46 |
Issue number | 10 A |
DOIs | |
Publication status | Published - 2007 Oct 9 |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)