Catalytic chemical vapor deposition of large-area uniform two-dimensional molybdenum disulfide using sodium chloride

Jeong Gyu Song, Gyeong Hee Ryu, Youngjun Kim, Whang Je Woo, Kyung Yong Ko, Yongsung Kim, Changseung Lee, Il Kwon Oh, Jusang Park, Zonghoon Lee, Hyungjun Kim

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39 Citations (Scopus)


The effective synthesis of atomically thin molybdenum disulfides (MoS2) of high quality and uniformity over a large area is essential for their use in electronic and optical devices. In this work, we synthesize MoS2 that exhibit a high quality and large area uniformity using chemical vapor deposition (CVD) with volatile S organic compound and NaCl catalysts. In the latter process, the NaCl enhances the growth rate (5 min for synthesis of monolayer MoS2) and purity of the synthesized MoS2. The optical microscopy, Raman spectroscopy, x-ray photoemission spectroscopy, photoluminescence, and transmission electron microscopy measurements indicate that the NaCl-CVD MoS2 has a large grain size, clear Raman shift, strong photoluminescence, good stoichiometry, and 6-fold coordination symmetry. Moreover, we demonstrate that the electron mobility (10.4 cm2 V-1 s-1) and on/off current ratio (3 ×107) of monolayer MoS2 measured using a field-effect transistor are comparable to those of previously reported MoS2 synthesized using CVD.

Original languageEnglish
Article number465103
Issue number46
Publication statusPublished - 2017 Oct 23

Bibliographical note

Funding Information:
This work was supported by the Center for Integrated Smart Sensors funded by the Ministry of Science, ICT & Future Planning as Global Frontier Project (CISS-2016M3A6A6930869), by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Education, Science and Technology(NRF-2015R1D1A1A01060064) and by the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIP) (No. NRF-2014R1A2A1A11 052588).

Publisher Copyright:
© 2017 IOP Publishing Ltd.

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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