Catalyst feature independent metal-assisted chemical etching of silicon

Engineering

• Metal Catalyst 80%
• Micron 40%
• Mass Transfer 40%
• Fabrication 20%
• Reactant 20%
• Byproduct 20%
• Anisotropic 20%
• Si Substrate 20%
• Etch Rate 20%
• Surfaces 20%
• Demonstrates 20%
• Mechanisms 20%
• Meshes 20%
• Catalyst 20%

Material Science

• Etching 100%
• Metal 60%
• Silicon 40%
• Diffusion 40%
• Semiconductor Material 20%
• Byproduct 20%
• Surface 20%
• Solid 20%
• Catalyst 20%