Carbon nanotubes network contact lubrication for highly reliable MEMS switch

Min Ho Seo; Eunhwan Jo; Seung Deok Ko; Jungwook Choi; Yong Hoon Yoon; Dae Sung Kwon; Jongbaeg Kim; Jun Bo Yoon

doi:10.1109/MEMSYS.2017.7863325

Carbon nanotubes network contact lubrication for highly reliable MEMS switch

Min Ho Seo, Eunhwan Jo, Seung Deok Ko, Jungwook Choi, Yong Hoon Yoon, Dae Sung Kwon, Jongbaeg Kim, Jun Bo Yoon

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

This paper firstly reports a highly reliable MEMS-switch employing a CNTs-network lubricant in the contact-area. By covering the contact-area with the CNTs-network, we achieved more than an order of magnitude extension in the lifetime of the MEMS-switch. We determined that this drastic improvement in the reliability arises from the compressibility of the CNTs-network, generating remarkable contact-area widening with suppressed adhesive interaction at the contact interface. We also observed that the highly flexible CNTs-network does not deteriorate high-speed operation of the device. The proposed switch exhibited a lifetime more than 10 times longer under hot-switching condition than a device without CNTs.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	5-8
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863325
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIP) & by MSIP as GFP/NRF-2015R1A2A1A01005496 & CISS-2012054187.

Publisher Copyright:
© 2017 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863325

Cite this

Seo, M. H., Jo, E., Ko, S. D., Choi, J., Yoon, Y. H., Kwon, D. S., Kim, J., & Yoon, J. B. (2017). Carbon nanotubes network contact lubrication for highly reliable MEMS switch. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 5-8). [7863325] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863325

Seo, Min Ho ; Jo, Eunhwan ; Ko, Seung Deok et al. / Carbon nanotubes network contact lubrication for highly reliable MEMS switch. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 5-8 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Carbon nanotubes network contact lubrication for highly reliable MEMS switch",

abstract = "This paper firstly reports a highly reliable MEMS-switch employing a CNTs-network lubricant in the contact-area. By covering the contact-area with the CNTs-network, we achieved more than an order of magnitude extension in the lifetime of the MEMS-switch. We determined that this drastic improvement in the reliability arises from the compressibility of the CNTs-network, generating remarkable contact-area widening with suppressed adhesive interaction at the contact interface. We also observed that the highly flexible CNTs-network does not deteriorate high-speed operation of the device. The proposed switch exhibited a lifetime more than 10 times longer under hot-switching condition than a device without CNTs.",

author = "Seo, {Min Ho} and Eunhwan Jo and Ko, {Seung Deok} and Jungwook Choi and Yoon, {Yong Hoon} and Kwon, {Dae Sung} and Jongbaeg Kim and Yoon, {Jun Bo}",

note = "Funding Information: This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIP) & by MSIP as GFP/NRF-2015R1A2A1A01005496 & CISS-2012054187. Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

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doi = "10.1109/MEMSYS.2017.7863325",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Seo, MH, Jo, E, Ko, SD, Choi, J, Yoon, YH, Kwon, DS, Kim, J & Yoon, JB 2017, Carbon nanotubes network contact lubrication for highly reliable MEMS switch. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863325, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 5-8, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863325

Carbon nanotubes network contact lubrication for highly reliable MEMS switch. / Seo, Min Ho; Jo, Eunhwan; Ko, Seung Deok et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 5-8 7863325 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Seo, Min Ho

AU - Jo, Eunhwan

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AU - Choi, Jungwook

AU - Yoon, Yong Hoon

AU - Kwon, Dae Sung

AU - Kim, Jongbaeg

AU - Yoon, Jun Bo

N1 - Funding Information: This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIP) & by MSIP as GFP/NRF-2015R1A2A1A01005496 & CISS-2012054187. Publisher Copyright: © 2017 IEEE.

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper firstly reports a highly reliable MEMS-switch employing a CNTs-network lubricant in the contact-area. By covering the contact-area with the CNTs-network, we achieved more than an order of magnitude extension in the lifetime of the MEMS-switch. We determined that this drastic improvement in the reliability arises from the compressibility of the CNTs-network, generating remarkable contact-area widening with suppressed adhesive interaction at the contact interface. We also observed that the highly flexible CNTs-network does not deteriorate high-speed operation of the device. The proposed switch exhibited a lifetime more than 10 times longer under hot-switching condition than a device without CNTs.

AB - This paper firstly reports a highly reliable MEMS-switch employing a CNTs-network lubricant in the contact-area. By covering the contact-area with the CNTs-network, we achieved more than an order of magnitude extension in the lifetime of the MEMS-switch. We determined that this drastic improvement in the reliability arises from the compressibility of the CNTs-network, generating remarkable contact-area widening with suppressed adhesive interaction at the contact interface. We also observed that the highly flexible CNTs-network does not deteriorate high-speed operation of the device. The proposed switch exhibited a lifetime more than 10 times longer under hot-switching condition than a device without CNTs.

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ER -

Seo MH, Jo E, Ko SD, Choi J, Yoon YH, Kwon DS et al. Carbon nanotubes network contact lubrication for highly reliable MEMS switch. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 5-8. 7863325. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863325

Carbon nanotubes network contact lubrication for highly reliable MEMS switch

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