TY - GEN
T1 - Carbon nanotubes-integrated inertial switch for reliable detection of threshold acceleration
AU - Lee, J. I.
AU - Song, Y.
AU - Jung, H. K.
AU - Choi, J.
AU - Eun, Y.
AU - Kim, J.
PY - 2011
Y1 - 2011
N2 - The vertically aligned carbon nanotube (CNT)-bundle is utilized as a mechanical buffer for inertial micro-switch to extend the contact time and therefore to obtain reliable and stable output signals. The CNT bundles are directly synthesized on two facing surfaces of both movable- and stationary electrodes by patterning the catalyst on released microstructures and the following thermal chemical vapor deposition process. When the movable electrode collides with the stationary electrode, CNT bundles are elastically deformed, significantly prolonging the contact time. The measured contact time of CNT integrated inertial micro-switch was 108 s, while the inertial micro-switch without CNT was 4.5 s.
AB - The vertically aligned carbon nanotube (CNT)-bundle is utilized as a mechanical buffer for inertial micro-switch to extend the contact time and therefore to obtain reliable and stable output signals. The CNT bundles are directly synthesized on two facing surfaces of both movable- and stationary electrodes by patterning the catalyst on released microstructures and the following thermal chemical vapor deposition process. When the movable electrode collides with the stationary electrode, CNT bundles are elastically deformed, significantly prolonging the contact time. The measured contact time of CNT integrated inertial micro-switch was 108 s, while the inertial micro-switch without CNT was 4.5 s.
UR - http://www.scopus.com/inward/record.url?scp=80052124976&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80052124976&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2011.5969201
DO - 10.1109/TRANSDUCERS.2011.5969201
M3 - Conference contribution
AN - SCOPUS:80052124976
SN - 9781457701573
T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
SP - 711
EP - 714
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Y2 - 5 June 2011 through 9 June 2011
ER -