CAD model analysis of the air-gap type TFBAR

Kun Wook Kim; Jong Gwan Yook; Han Kyu Park

doi:10.1002/mop.10469

CAD model analysis of the air-gap type TFBAR

Kun Wook Kim, Jong Gwan Yook, Han Kyu Park

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A CAD model for an air-gap-type TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel resonance frequency.

Original language	English
Pages (from-to)	384-385
Number of pages	2
Journal	Microwave and Optical Technology Letters
Volume	34
Issue number	5
DOIs	https://doi.org/10.1002/mop.10469
Publication status	Published - 2002 Sept 5

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1002/mop.10469

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title = "CAD model analysis of the air-gap type TFBAR",

abstract = "A CAD model for an air-gap-type TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel resonance frequency.",

author = "Kim, {Kun Wook} and Yook, {Jong Gwan} and Park, {Han Kyu}",

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AB - A CAD model for an air-gap-type TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel resonance frequency.

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JO - Microwave and Optical Technology Letters

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CAD model analysis of the air-gap type TFBAR

Abstract

All Science Journal Classification (ASJC) codes

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