CAD model analysis of the air-gap type TFBAR

Kun Wook Kim, Jong Gwan Yook, Han Kyu Park

Research output: Contribution to journalArticlepeer-review


A CAD model for an air-gap-type TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel resonance frequency.

Original languageEnglish
Pages (from-to)384-385
Number of pages2
JournalMicrowave and Optical Technology Letters
Issue number5
Publication statusPublished - 2002 Sept 5

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


Dive into the research topics of 'CAD model analysis of the air-gap type TFBAR'. Together they form a unique fingerprint.

Cite this