Biosensors for label free detection based on RF and MEMS technology

Y. I. Kim, T. S. Park, J. H. Kang, M. C. Lee, J. T. Kim, J. H. Park, H. K. Baik

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)


A bio-detection method and devices based on RF electric signals and MEMS are proposed and demonstrated by a label free method. We have fabricated a transmission line, an inductive device, and a capacitive device with silicon-based MEMS technology. Main issues are fabrication of devices by MEMS technology, surface modification from hydrophobic to hydrophilic of a benzocyclobutene (BCB) layer by plasma radiation and RF signal measurement before and after bio-processing. The devices made by MEMS technology consist of a BCB polymer and Cu metal patterns on a silicon substrate. Glucose oxidase (GOx) and poly dimethyldiallyl ammonium chloride (PDAC) are used as a biomolecule target and probe. The measured output of power loss is 0.8 dB at 1.9 GHz, and its value is pretty distinguishable from the noise level. From the above-mentioned results, it is clear that the proposed RF method and designs are very effective and powerful as a label free detection system.

Original languageEnglish
Pages (from-to)592-599
Number of pages8
JournalSensors and Actuators, B: Chemical
Issue number2
Publication statusPublished - 2006 Dec 7

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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