Abstract
A bio-detection method and devices based on RF electric signals and MEMS are proposed and demonstrated by a label free method. We have fabricated a transmission line, an inductive device, and a capacitive device with silicon-based MEMS technology. Main issues are fabrication of devices by MEMS technology, surface modification from hydrophobic to hydrophilic of a benzocyclobutene (BCB) layer by plasma radiation and RF signal measurement before and after bio-processing. The devices made by MEMS technology consist of a BCB polymer and Cu metal patterns on a silicon substrate. Glucose oxidase (GOx) and poly dimethyldiallyl ammonium chloride (PDAC) are used as a biomolecule target and probe. The measured output of power loss is 0.8 dB at 1.9 GHz, and its value is pretty distinguishable from the noise level. From the above-mentioned results, it is clear that the proposed RF method and designs are very effective and powerful as a label free detection system.
| Original language | English |
|---|---|
| Pages (from-to) | 592-599 |
| Number of pages | 8 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 119 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2006 Dec 7 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry