Bendable thin-film transistors based on sol-gel derived amorphous Ga-doped In2O3 semiconductors

Sunho Jeong, Ji Yoon Lee, Moon Ho Ham, Keunkyu Song, Jooho Moon, Yeong Hui Seo, Beyong Hwan Ryu, Youngmin Choi

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12 Citations (Scopus)


Bendable thin-film transistors (TFTs) are demonstrated based on sol-gel-derived amorphous Ga-doped In2O3 (GIO) that can be thermally converted into a device-quality semiconducting layer at 300 C, which is compatible with a plastic polyimide (PI) substrate. The device performance of the GIO TFTs is studied through the investigation on the electrical parameters (including mobility, threshold voltage, off-current, and subthreshold swing) of the devices as a function of Ga composition. With increasing Ga composition up to 36 mol%, the mobility decreases from 1.4 to 0.08 cm2 V s -1 with sluggish reduction in the Ga compositional range between 0 and 12 mol%, and the threshold voltage shifts from -21.6 to 13.5 V. Both the off-current and subthreshold swing decreases with a dramatic variation at Ga composition of 12 mol%. From the overall analysis, it is concluded that the incorporation of 12 mol% Ga enables for the GIO semiconducting layer with the best electrical performance. In addition, the bending characteristics of GIO TFTs, prepared on a SiO2/ITO/PI substrate, are analyzed with device performance variations depending on the bending radius. It is demonstrated that the device performance is maintained with acceptable electrical characteristics under a bending radius of 10 mm.

Original languageEnglish
Pages (from-to)21-28
Number of pages8
JournalSuperlattices and Microstructures
Publication statusPublished - 2013

Bibliographical note

Funding Information:
This work was supported by a project funded by the Ministry of Knowledge Economy (KK-1102-B0), and by a grant from the Industrial Source Technology Development Program funded by the Ministry of Knowledge and Economy (TS-101-39). It was partially supported by the Mid-Career Researcher Program through an NRF grant funded by the MEST (No. 2009-0086302). M.H. Ham acknowledge support by the WCU program through an NRF Grant (R31-10026) of MEST.

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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