Batch-processed semiconductor gas sensor array for the selective detection of NOx in automotive exhaust gas

Hani Jang; Minki Kim; Yongjun Kim

doi:10.1186/s40486-016-0031-9

Batch-processed semiconductor gas sensor array for the selective detection of NO_x in automotive exhaust gas

Hani Jang, Minki Kim, Yongjun Kim

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NO_x) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO₂ + SnO₂ (15 wt%), SnO₂, and Ga₂O₃] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.

Original language	English
Article number	6
Journal	Micro and Nano Systems Letters
Volume	4
Issue number	1
DOIs	https://doi.org/10.1186/s40486-016-0031-9
Publication status	Published - 2016 Dec 1

Bibliographical note

Funding Information:
This work was supported by the R&D program of MOTIE/KEIT. [10054548, Development of Suspended Heterogeneous Nanostructure‑based Hazardous Gas Microsensor System].

Publisher Copyright:
© 2016, The Author(s).

All Science Journal Classification (ASJC) codes

Biomaterials
Biomedical Engineering

Access to Document

10.1186/s40486-016-0031-9

Cite this

@article{959d2b384fab46feb378a9fa43dd926f,

title = "Batch-processed semiconductor gas sensor array for the selective detection of NOx in automotive exhaust gas",

abstract = "This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NOx) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO2 + SnO2 (15 wt%), SnO2, and Ga2O3] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.",

author = "Hani Jang and Minki Kim and Yongjun Kim",

note = "Funding Information: This work was supported by the R&D program of MOTIE/KEIT. [10054548, Development of Suspended Heterogeneous Nanostructure‑based Hazardous Gas Microsensor System]. Publisher Copyright: {\textcopyright} 2016, The Author(s).",

year = "2016",

month = dec,

day = "1",

doi = "10.1186/s40486-016-0031-9",

language = "English",

volume = "4",

journal = "Micro and Nano Systems Letters",

issn = "2213-9621",

publisher = "Springer Open",

number = "1",

}

TY - JOUR

T1 - Batch-processed semiconductor gas sensor array for the selective detection of NOx in automotive exhaust gas

AU - Jang, Hani

AU - Kim, Minki

AU - Kim, Yongjun

N1 - Funding Information: This work was supported by the R&D program of MOTIE/KEIT. [10054548, Development of Suspended Heterogeneous Nanostructure‑based Hazardous Gas Microsensor System]. Publisher Copyright: © 2016, The Author(s).

PY - 2016/12/1

Y1 - 2016/12/1

N2 - This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NOx) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO2 + SnO2 (15 wt%), SnO2, and Ga2O3] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.

AB - This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NOx) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO2 + SnO2 (15 wt%), SnO2, and Ga2O3] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.

UR - http://www.scopus.com/inward/record.url?scp=85065127424&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85065127424&partnerID=8YFLogxK

U2 - 10.1186/s40486-016-0031-9

DO - 10.1186/s40486-016-0031-9

M3 - Article

AN - SCOPUS:85065127424

SN - 2213-9621

VL - 4

JO - Micro and Nano Systems Letters

JF - Micro and Nano Systems Letters

IS - 1

M1 - 6

ER -