Application of MRF scheme for low-loss transmission lines on CMOS-grade silicon

Sang No Lee, Sung Jun Park, Joon Ik Lee, Jong Gwan Yook, Yong Jun Kim, Sang Jo Lee

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


This paper presents a surface finishing method based on magnetorheological (MR) fluid to obtain low-loss coplanar waveguides on CMOS-grade silicon. CPWs with different lateral dimension but having identical 50 Ω characteristic impedance are evaluated. In addition, finite ground effects on CPW performances before and after magnetorheological finishing (MRF) treatment are investigated. In all cases, CPWs treated with the MR fluid-based finishing method reveal much lower attenuation constants compared to original ones owing to reduced conductor roughness. The proposed MRF scheme can be applied to smoothen three dimensional high frequency structures and dramatically improve conductor roughness.

Original languageEnglish
Pages (from-to)1514-1518
Number of pages5
JournalProceedings - Electronic Components and Technology Conference
Publication statusPublished - 2005
Event55th Electronic Components and Technology Conference, ECTC - Lake Buena Vista, FL, United States
Duration: 2005 May 312005 Jun 4

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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