Application of mesoporous TiO2 as a thermal isolation layer for infrared sensors

Sun Gyu Choi; Tae Jung Ha; Byoung Gon Yu; Sangwoo Shin; Hyung Hee Cho; Hyung Ho Park

doi:10.1016/j.tsf.2007.07.001

Application of mesoporous TiO₂ as a thermal isolation layer for infrared sensors

Sun Gyu Choi, Tae Jung Ha, Byoung Gon Yu, Sangwoo Shin, Hyung Hee Cho, Hyung Ho Park

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

An ordered, mesoporous TiO₂ thin film could possibly enhance the efficiency of a microbolometer when used as a thermal isolation layer. The infrared transmission characteristics of a 150 nm thick mesoporous TiO₂ film were measured by FT-IR. The calculated infrared absorption rate was higher than 85% in the 8-12 μm wavelength region. The thermal conductivity of a mesoporous TiO₂ film was measured by the 3ω method. The CFD-ACE program was used to simulate the thermal isolation effect of a mesoporous TiO₂ film inserted in a microbolometer structure. The simulation shows that a great enhancement in the thermal insulation was obtained by using a mesoporous TiO₂ layer. The mesoporous TiO₂ thin film effectively blocks heat flow from TiN absorber to the bottom layer and returns the downstream heat to the upper resistor layer.

Original language	English
Pages (from-to)	212-215
Number of pages	4
Journal	Thin Solid Films
Volume	516
Issue number	2-4
DOIs	https://doi.org/10.1016/j.tsf.2007.07.001
Publication status	Published - 2007 Dec 3

Bibliographical note

Funding Information:
This work was supported by the IT R&D program of MIC/IITA [2006-S054-01, Development of CMOS based MEMS processed multi-functional sensor for ubiquitous environment]. Experiments at PLS were supported in part by MOST and POSTECH.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2007.07.001

Cite this

@article{09ffb0b71ce14804b1ed5086fd5b0186,

title = "Application of mesoporous TiO2 as a thermal isolation layer for infrared sensors",

abstract = "An ordered, mesoporous TiO2 thin film could possibly enhance the efficiency of a microbolometer when used as a thermal isolation layer. The infrared transmission characteristics of a 150 nm thick mesoporous TiO2 film were measured by FT-IR. The calculated infrared absorption rate was higher than 85% in the 8-12 μm wavelength region. The thermal conductivity of a mesoporous TiO2 film was measured by the 3ω method. The CFD-ACE program was used to simulate the thermal isolation effect of a mesoporous TiO2 film inserted in a microbolometer structure. The simulation shows that a great enhancement in the thermal insulation was obtained by using a mesoporous TiO2 layer. The mesoporous TiO2 thin film effectively blocks heat flow from TiN absorber to the bottom layer and returns the downstream heat to the upper resistor layer.",

author = "Choi, {Sun Gyu} and Ha, {Tae Jung} and Yu, {Byoung Gon} and Sangwoo Shin and Cho, {Hyung Hee} and Park, {Hyung Ho}",

note = "Funding Information: This work was supported by the IT R&D program of MIC/IITA [2006-S054-01, Development of CMOS based MEMS processed multi-functional sensor for ubiquitous environment]. Experiments at PLS were supported in part by MOST and POSTECH.",

year = "2007",

month = dec,

day = "3",

doi = "10.1016/j.tsf.2007.07.001",

language = "English",

volume = "516",

pages = "212--215",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "2-4",

}

TY - JOUR

T1 - Application of mesoporous TiO2 as a thermal isolation layer for infrared sensors

AU - Choi, Sun Gyu

AU - Ha, Tae Jung

AU - Yu, Byoung Gon

AU - Shin, Sangwoo

AU - Cho, Hyung Hee

AU - Park, Hyung Ho

N1 - Funding Information: This work was supported by the IT R&D program of MIC/IITA [2006-S054-01, Development of CMOS based MEMS processed multi-functional sensor for ubiquitous environment]. Experiments at PLS were supported in part by MOST and POSTECH.

PY - 2007/12/3

Y1 - 2007/12/3

N2 - An ordered, mesoporous TiO2 thin film could possibly enhance the efficiency of a microbolometer when used as a thermal isolation layer. The infrared transmission characteristics of a 150 nm thick mesoporous TiO2 film were measured by FT-IR. The calculated infrared absorption rate was higher than 85% in the 8-12 μm wavelength region. The thermal conductivity of a mesoporous TiO2 film was measured by the 3ω method. The CFD-ACE program was used to simulate the thermal isolation effect of a mesoporous TiO2 film inserted in a microbolometer structure. The simulation shows that a great enhancement in the thermal insulation was obtained by using a mesoporous TiO2 layer. The mesoporous TiO2 thin film effectively blocks heat flow from TiN absorber to the bottom layer and returns the downstream heat to the upper resistor layer.

AB - An ordered, mesoporous TiO2 thin film could possibly enhance the efficiency of a microbolometer when used as a thermal isolation layer. The infrared transmission characteristics of a 150 nm thick mesoporous TiO2 film were measured by FT-IR. The calculated infrared absorption rate was higher than 85% in the 8-12 μm wavelength region. The thermal conductivity of a mesoporous TiO2 film was measured by the 3ω method. The CFD-ACE program was used to simulate the thermal isolation effect of a mesoporous TiO2 film inserted in a microbolometer structure. The simulation shows that a great enhancement in the thermal insulation was obtained by using a mesoporous TiO2 layer. The mesoporous TiO2 thin film effectively blocks heat flow from TiN absorber to the bottom layer and returns the downstream heat to the upper resistor layer.

UR - http://www.scopus.com/inward/record.url?scp=36048998769&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36048998769&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2007.07.001

DO - 10.1016/j.tsf.2007.07.001

M3 - Article

AN - SCOPUS:36048998769

SN - 0040-6090

VL - 516

SP - 212

EP - 215

JO - Thin Solid Films

JF - Thin Solid Films

IS - 2-4

ER -