Analysis and improvement of dynamic characteristic of 3-axis nano stage

Choong Kim; Kang Nyung Lee; Dong Ju Lee; No Cheol Park; Young Pil Park; Jung Woo Park; Dong Jin Lee; Moon Gu Lee; Hyoung Oil Choi; Suk Won Lee

doi:10.1109/ICMECH.2005.1529223

Analysis and improvement of dynamic characteristic of 3-axis nano stage

Choong Kim, Kang Nyung Lee, Dong Ju Lee, No Cheol Park, Young Pil Park, Jung Woo Park, Dong Jin Lee, Moon Gu Lee, Hyoung Oil Choi, Suk Won Lee

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The precision positioning system requires robust design to obtain enough bandwidth. Therefore, the subresonance occurred by the disaccord efforce center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

Original language	English
Title of host publication	Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Pages	34-38
Number of pages	5
DOIs	https://doi.org/10.1109/ICMECH.2005.1529223
Publication status	Published - 2005
Event	2005 IEEE International Conference on Mechatronics, ICM '05 - Taipei, Taiwan, Province of China Duration: 2005 Jul 10 → 2005 Jul 12

Publication series

Name	Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Volume	2005

Other

Other	2005 IEEE International Conference on Mechatronics, ICM '05
Country/Territory	Taiwan, Province of China
City	Taipei
Period	05/7/10 → 05/7/12

All Science Journal Classification (ASJC) codes

Engineering(all)

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10.1109/ICMECH.2005.1529223

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Kim, C., Lee, K. N., Lee, D. J., Park, N. C., Park, Y. P., Park, J. W., Lee, D. J., Lee, M. G., Choi, H. O., & Lee, S. W. (2005). Analysis and improvement of dynamic characteristic of 3-axis nano stage. In Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05 (pp. 34-38). Article 1529223 (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05; Vol. 2005). https://doi.org/10.1109/ICMECH.2005.1529223

@inproceedings{69f8e8f0c6444c4ab11b7cc9d78eaec8,

title = "Analysis and improvement of dynamic characteristic of 3-axis nano stage",

abstract = "The precision positioning system requires robust design to obtain enough bandwidth. Therefore, the subresonance occurred by the disaccord efforce center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).",

author = "Choong Kim and Lee, {Kang Nyung} and Lee, {Dong Ju} and Park, {No Cheol} and Park, {Young Pil} and Park, {Jung Woo} and Lee, {Dong Jin} and Lee, {Moon Gu} and Choi, {Hyoung Oil} and Lee, {Suk Won}",

year = "2005",

doi = "10.1109/ICMECH.2005.1529223",

language = "English",

isbn = "0780389980",

series = "Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05",

pages = "34--38",

booktitle = "Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05",

note = "2005 IEEE International Conference on Mechatronics, ICM '05 ; Conference date: 10-07-2005 Through 12-07-2005",

}

Kim, C, Lee, KN, Lee, DJ, Park, NC, Park, YP, Park, JW, Lee, DJ, Lee, MG, Choi, HO & Lee, SW 2005, Analysis and improvement of dynamic characteristic of 3-axis nano stage. in Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05., 1529223, Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05, vol. 2005, pp. 34-38, 2005 IEEE International Conference on Mechatronics, ICM '05, Taipei, Taiwan, Province of China, 05/7/10. https://doi.org/10.1109/ICMECH.2005.1529223

Analysis and improvement of dynamic characteristic of 3-axis nano stage. / Kim, Choong; Lee, Kang Nyung; Lee, Dong Ju et al.
Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05. 2005. p. 34-38 1529223 (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Analysis and improvement of dynamic characteristic of 3-axis nano stage

AU - Kim, Choong

AU - Lee, Kang Nyung

AU - Lee, Dong Ju

AU - Park, No Cheol

AU - Park, Young Pil

AU - Park, Jung Woo

AU - Lee, Dong Jin

AU - Lee, Moon Gu

AU - Choi, Hyoung Oil

AU - Lee, Suk Won

PY - 2005

Y1 - 2005

N2 - The precision positioning system requires robust design to obtain enough bandwidth. Therefore, the subresonance occurred by the disaccord efforce center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

AB - The precision positioning system requires robust design to obtain enough bandwidth. Therefore, the subresonance occurred by the disaccord efforce center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

UR - http://www.scopus.com/inward/record.url?scp=33748888583&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33748888583&partnerID=8YFLogxK

U2 - 10.1109/ICMECH.2005.1529223

DO - 10.1109/ICMECH.2005.1529223

M3 - Conference contribution

AN - SCOPUS:33748888583

SN - 0780389980

SN - 9780780389984

T3 - Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05

SP - 34

EP - 38

BT - Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05

T2 - 2005 IEEE International Conference on Mechatronics, ICM '05

Y2 - 10 July 2005 through 12 July 2005

ER -

Analysis and improvement of dynamic characteristic of 3-axis nano stage

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